Title: Disk plasma generation using a holey-plate surface-wave structure on a coaxial waveguide
Abstract:Plasma created and sustained by a surface wave from a partial-coaxial cavity resonator have been studied. In this work, two types of plasma source geometries are compared, (1) a dielectric disk on gro...Plasma created and sustained by a surface wave from a partial-coaxial cavity resonator have been studied. In this work, two types of plasma source geometries are compared, (1) a dielectric disk on ground plane structure (DPSW), and (2) a dielectric disk between a parallel plate structure with a holey top plate (HPSW). In both cases, an evanescent electric field is produced from the cavity resonator to a plasma production chamber of 40 mm diameter. Thus, high-density plasma is generated by the interaction of the evanescent field with particles. This work shows that the plasma density and uniformity of the holey-plate structure is higher than that of the dielectric disk structure. For the holey-plate structure, the plasma density is 7.5×1011 cm−3 with an electron temperature of 3 eV at an argon gas pressure of 13 Pa.Read More
Publication Year: 1998
Publication Date: 1998-05-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 14
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