Title: [3D] Nano-Scale Ferroelectric Devices for Memory Applications
Abstract: Abstract A description is presented of present efforts to make thin-films for ferroelectric memory devices into truly three-dimensional objects, such as nano-tubes, nano-rods, and nano-ribbons. These may have important applications for DRAM trenched capacitors. A summary of state-of-the-art magnetic RAM (MRAM) and ferroelectric FRAM devices is included. Keywords: Nanoscale fabricationnano cellsnano tubesnano ribbonsnano rodsnano ferroelectrics Acknowledgment This work was supported by the Cambridge-MIT Institute (CMI). It is a pleasure to acknowledge helpful discussions with M. Dawber, D. J. Jung, A. Ruediger, F. Morrison, L. Ramsay, J. Kut, M. Gregg, P. Littlewood, P. Chandra, and J. Robertson.
Publication Year: 2005
Publication Date: 2005-06-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 30
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