Title: Preparation of a Functionally Graded Fluoropolymer Thin Film and Its Application to Antireflective Coating
Abstract: Fluoropolymer thin films were prepared by the ion-assisted vapor deposition polymerization (IAD) of 2-(perfluorohexyl) ethylacrylate (Rf-6) under Ar ion irradiation. The ion acceleration voltage V a largely affected the film characteristics. With increasing V a , the adhesion strength between the film and the substrate improved, while the surface energy and the refractive index increased. To attain a high adhesion strength, a low surface energy, and a low optical reflectivity simultaneously, a functionally graded film was prepared by varying V a from 300 to 0 V continually in the course of film growth. As a consequence, an antireflective coating with good adhesion and low surface energy was obtained. The optical reflectivity of a glass substrate was reduced from 4.9 to 0.55% at a wavelength of 400 nm by depositing a 100-nm-thick single-layer functionally graded fluoropolymer film. The surface energy of this film was 8.5 mJ/m 2 .
Publication Year: 2013
Publication Date: 2013-05-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 6
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