Title: System test for high-NA objectives at the 157-nm wavelength
Abstract: Focusing on small features for optical inspection or defect repair, shorter wavelengths are used to increase resolution and energy density. Objectives designed for 157 nm using calcium fluoride are optimized and evaluated interferometrically at the wavelength of use to include all actinic effects. An image evaluation set-up is presented using a custom illuminator to image 130nm features, enlarged 500 times, onto a back-thinned CCD camera in real time.
Publication Year: 2004
Publication Date: 2004-02-26
Language: en
Type: article
Indexed In: ['crossref']
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