Title: New studies of reactive pulsed laser deposition
Abstract: We report the synthesis and deposition of TiC films by reactive pulsed laser deposition. Ti targets have been submitted to multipulse UV laser action in low pressure CH<SUB>4</SUB>. The thin films were grown on a collector placed parallel to the target. The films were characterized by electron microscopy, electron spectroscopy and nuclear techniques.
Publication Year: 1998
Publication Date: 1998-07-02
Language: en
Type: article
Indexed In: ['crossref']
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