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[592], '(www.interscience.wiley.com).': [593], 'DOI': [594], '10.1002/mop.20974': [595], 'REFERENCES': [596], '1': [597], 'J.L.': [598, 1440], 'Hudgins,': [599], 'Wide': [600], 'narrow': [602], 'bandgap': [603], 'semiconductors': [604], 'electronics:': [607], 'A': [608, 1546], 'valuation,': [610], 'J': [611, 647, 955, 973, 1007, 1099, 1128, 1157, 1203, 1450], 'Electron': [612, 680, 717, 749, 787, 819, 863, 908, 938, 1074, 1238, 1274, 1489, 1526, 1595, 1635], 'Mater': [613], '32': [614, 1605], '(2003),': [615, 684, 1207], '471–477.': [616], '10.1007/s11664-003-0128-9': [617], 'CASWeb': [618, 655, 687, 724, 755, 794, 870, 914, 945, 962, 980, 1014, 1044, 1079, 1106, 1135, 1165, 1210, 1243, 1280, 1312, 1417, 1457, 1496, 1532, 1601, 1642], 'Science®Google': [620, 657, 689, 726, 757, 796, 827, 872, 916, 947, 964, 982, 1016, 1046, 1081, 1108, 1137, 1167, 1212, 1245, 1282, 1314, 1358, 1419, 1459, 1498, 1534, 1567, 1603, 1644], 'Scholar': [621, 658, 690, 727, 758, 797, 828, 873, 887, 917, 948, 965, 983, 1017, 1047, 1082, 1109, 1138, 1168, 1213, 1246, 1283, 1315, 1359, 1380, 1420, 1460, 1499, 1535, 1568, 1604, 1645], '2': [622], 'J.R.': [623, 1470], 'Shealy,': [624, 1471], 'V.': [625, 627, 1321, 1570, 1606], 'Kaper,': [626], 'Tilak,': [628], 'T.': [629, 666, 702, 1170, 1176, 1180, 1184, 1187], 'Prunty,': [630], 'J.A.': [631, 894, 922, 1468], 'Smart,': [632, 1469], 'Green,': [634, 1463], 'L.F.': [636, 1473], 'Eastman,': [637, 1474], 'An': [638], 'high-electron-mobility': [640], 'transistor': [641], 'AlN': [644], 'sub-buffer': [645], 'layer,': [646], 'Phys': [648, 1009, 1038, 1158, 1205, 1306, 1411], 'Condens': [649, 1159], 'Matter': [650, 1160], '14': [651, 984], '(2002),': [652, 1132, 1353, 1639], '3499–3509.': [653], '10.1088/0953-8984/14/13/308': [654], '3': [659], 'Ando,': [661], 'Okamoto,': [663], 'H.': [664, 1182, 1294], 'Miyamoto,': [665], 'Inoue,': [667], 'Kuzuhara,': [670], '10-W/mm': [671], 'AlGaN-GaN': [672, 856], 'HFET': [673, 1448], 'modulating': [677], 'plate,': [678], 'IEEE': [679, 716, 786, 818, 862, 906, 937, 1488, 1524, 1556, 1634], 'Dev': [681, 718, 788, 820, 864, 909, 939, 1490, 1527, 1636], '24': [683, 1316], '289–291.': [685], '10.1109/LED.2003.812532': [686], 'Y.F.': [692, 799], 'Wu,': [693, 800], 'A.': [694, 729, 768, 770, 1539, 1612], 'Saxler,': [695], 'R.P.': [696, 842], 'Smith,': [697], 'S.': [698, 735, 737, 766, 772, 1505], 'Sheppard,': [699], 'P.M.': [700, 1254], 'Chavarkar,': [701], 'Wisleder,': [703], 'U.K.': [704, 740, 777, 810, 1508], 'Mishra,': [705, 741, 778, 811, 1509], 'P.': [707, 805, 1117, 1146, 1579], 'Parikh,': [708, 806], '30-W/mm': [709], 'GaN': [710, 860, 1069, 1191], 'optimization,': [715], '25': [720, 790, 822, 866, 1360], '(2004),': [721, 752, 791, 867, 1162], '117–119.': [722], '10.1109/LED.2003.822667': [723], '5': [728], 'Chini,': [730, 771], 'Buttari,': [732, 765], 'R.': [733, 762, 836, 875, 1438, 1501, 1574, 1610], 'Coffie,': [734, 763], 'Heikman,': [736, 767], 'Keller,': [738, 773, 808, 1506], '12-W/mm': [742], 'substrate,': [748], '40': [751], '73–74.': [753], '10.1049/el:20040017': [754], '6': [759], 'L.': [760, 1436], 'Chen,': [761, 1265], 'Chakraborty,': [769], 'S.P.': [774], 'Denbaars,': [775], 'High-power': [779], 'polarization-engineered': [780], 'GaN/AlGaN/GaN': [781], 'surface': [784, 1478, 1513], 'passivation,': [785], '7–9.': [792], '10.1109/LED.2003.821673': [793], '7': [798], 'Kapolnek,': [802], 'J.P.': [803, 1364], 'Ibbeston,': [804], 'B.P.': [807], 'Very': [812, 1296], 'high': [813, 1339, 1590, 1593], 'density': [815, 855], 'HEMTs,': [817, 1347], '(2001),': [823, 1454, 1529, 1598], '586–590.': [824], 'Web': [825, 1356, 1565], '8': [829], 'K.K.': [830, 1464], 'Chu,': [831, 951, 1465], 'P.C.': [832], 'Chao,': [833], 'M.T.': [834], 'Pizzella,': [835], 'Actis,': [837], 'D.E.': [838], 'Meharry,': [839], 'K.B.': [840], 'Nichols,': [841], 'Vaudo,': [843], 'X.': [844], 'Xu,': [845], 'J.S.': [846, 1386], 'Flynn,': [847], 'Dion,': [849], 'G.R.': [851], 'Brandes,': [852], '9.4-W/mm': [853], 'free-standing': [859], 'substrates,': [861], '596–598.': [868], '10.1109/LED.2004.833847': [869], '9': [874], 'Williams,': [876, 1387], 'In': [877], 'modern': [878], 'GaAs': [879], 'proc': [880], 'met,': [881], 'Artech': [882], 'House,': [883], 'Boston,': [884], '1990.': [885], 'Google': [886, 1379], '10': [888], 'S.R.': [889, 919], 'Bahl,': [890], 'M.H.': [891], 'Leary,': [892], 'del': [895, 923], 'Alamo,': [896, 924], 'Mesa-sidewall': [897], 'gate': [898, 928], 'leakage': [899, 929], 'InAlAs/InGaAs': [901, 931], 'heterostructure': [902], 'effect': [904, 1476], 'transistors,': [905], 'Trans': [907, 1525, 1557], '39': [910], '(1992),': [911, 942], '2037–2043.': [912], '10.1109/16.155875': [913], '11': [918], 'Bahl': [920], 'Elimination': [925], 'mesa-sidewall': [927], 'heterostructures': [932], 'selective': [934], 'sidewall': [935], 'recessing,': [936], '13': [941, 966], '195–197.': [943], '10.1109/55.145018': [944], '12': [949], 'T.L.': [950], 'Gallium': [952], 'nitride': [953], 'films,': [954], 'Electrochem': [956, 974], 'Soc': [957, 975], '118': [958], '(1971),': [959], '1200–1205.': [960], '10.1149/1.2408280': [961], 'J.I.': [967], 'Pankove,': [968], 'Electrolytic': [969], 'etching': [970], 'GaN,': [972, 1006, 1036, 1127, 1156, 1304, 1409], '119': [976], '(1972),': [977], '1118–1119.': [978], '10.1149/1.2404410': [979], 'S.C.': [985], 'Binari,': [986], 'H.B.': [987], 'Dietrich,': [988], 'G.': [989, 1248, 1537, 1614], 'Kelner,': [990], 'L.B.': [991], 'Rowland,': [992], 'K.J.': [993], 'Doverspike,': [994], 'D.K.': [996], 'Wickenden,': [997], 'H,': [998], 'He': [999], 'N': [1001], 'implant': [1002, 1268], 'isolation': [1003, 1034, 1066, 1269], 'n-type': [1005], 'Appl': [1008, 1037, 1204, 1305, 1410], '78': [1010], '(1995),': [1011, 1041, 1076], '3008–3011.': [1012], '10.1063/1.360712': [1013], '15': [1018], 'S.J.': [1019, 1055, 1226, 1392], 'Pearton,': [1020, 1056, 1227, 1393], 'C.B.': [1021, 1051], 'Vartuli,': [1022, 1052], 'J.C.': [1023, 1084, 1115, 1144, 1327, 1382], 'Zolper,': [1024, 1085, 1383], 'Yuan,': [1026], 'R.A.': [1028], 'Stall,': [1029], 'Ion': [1030, 1086, 1228], 'implantation': [1031, 1087, 1196, 1229, 1407], 'doping': [1032, 1095], '67': [1040], '1435–1437.': [1042], '10.1063/1.114518': [1043], '16': [1048, 1161], 'R.G.': [1049, 1221], 'Wilson,': [1050, 1222], 'C.R.': [1053], 'Abernathy,': [1054], 'J.M.': [1058], 'Zavada,': [1059], 'Implantation': [1060], 'redistribution': [1062], 'dopants': [1064], 'species': [1067], 'related': [1071], 'compounds,': [1072], 'Solid-State': [1073, 1237], '38': [1075], '1329–1333.': [1077], '10.1016/0038-1101(94)00251-A': [1078], 'group': [1089], 'III-nitride': [1090], 'semiconductors:': [1091], 'tool': [1093], 'defect': [1097], 'studies,': [1098], 'Crystal': [1100, 1451], 'Growth': [1101, 1452], '178': [1102], '(1997),': [1103, 1240, 1414], '157–167.': [1104], '10.1016/S0022-0248(97)00076-6': [1105], '18': [1110], 'Dhamelincourt,': [1118, 1147], 'M.A.': [1120, 1149, 1330], 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'Hanington,': [1249], 'Y.M.': [1250], 'Hsin,': [1251], 'Q.Z.': [1252], 'Liu,': [1253], 'Asbeck,': [1255], 'S.S.': [1256], 'Lau,': [1257], 'Asif': [1259, 1619], 'Kahn,': [1260, 1620], 'J.W.': [1261], 'Yang,': [1262, 1617], 'Q.': [1264, 1503], 'P/He': [1266], 'HFETs,': [1273, 1523], '34': [1276, 1352], '(1998),': [1277, 1562], '193–195.': [1278], '10.1049/el:19980091': [1279], '23': [1284, 1638], 'M.E.': [1285], 'Lin,': [1286], 'Ma,': [1288], 'F.Y.': [1289], 'Huang,': [1290], 'L.H.': [1291], 'Allen,': [1292], 'Morkoç,': [1295], 'low': [1297], 'resistance': [1298], 'ohmic': [1299], 'contacts': [1300], 'wide': [1302], 'band-gap': [1303], '64': [1308], '(1994),': [1309], '1003–1005.': [1310], '10.1063/1.111961': [1311], 'Hoel,': [1322], 'I.': [1332, 1424, 1582, 1622], 'Daumiller,': [1333], 'E.': [1335, 1544], 'Kohn,': [1336], 'Effects': [1337], 'temperature': [1340], 'electrical': [1343], 'behavior': [1344], '6–9.': [1354], '10.1002/mop.10355': [1355], 'J.F.': [1361], 'Ziegler': [1362], 'Biersak,': [1365], 'stopping': [1367], 'range': [1369], 'solids,': [1373], 'Pergamon': [1374], 'Press,': [1375], 'London,': [1376], 'pp.': [1377], '1977–1985.': [1378], '26': [1381], 'H.H.': [1384], 'Tan,': [1385], 'Zou,': [1389], 'D.J.H.': [1390], 'Cockayne,': [1391], 'Hagerott': [1395], 'Crawford,': [1396], 'R.F.': [1398], 'Karlicek,': [1399], 'Electrical': [1400], 'structural': [1402], 'analysis': [1403], 'high-dose': [1405], 'Si': [1406], '70': [1413], '2729–2731.': [1415], '10.1063/1.119254': [1416], '27': [1421], 'Moerman,': [1425], 'Sharma,': [1427], 'R.H.': [1428], 'Wallis,': [1429], 'Cheyns,': [1431], 'K.': [1432], 'Jacobs,': [1433], 'E.J.': [1434], 'Trush,': [1435], 'Considine,': [1437], 'Beanland,': [1439], 'Farvacque,': [1441], 'Humphrey,': [1444], 'Material': [1445], 'optimization': [1446], 'applications,': [1449], '230': [1453], '573–578.': [1455], '10.1016/S0022-0248(01)01303-3': [1456], '28': [1461], 'B.M.': [1462], 'E.M.': [1466], 'Chumbes,': [1467], 'passivation': [1479], 'characteristics': [1483, 1520], 'undoped': [1485], "HEMT's,": [1487], '(2000),': [1493], '268–270.': [1494], '10.1109/55.843146': [1495], '29': [1500], 'Vetury,': [1502], 'Zhang,': [1504], 'impact': [1511], 'states': [1514], 'DC': [1517], 'RF': [1519], '48': [1528], '560–566.': [1530], '10.1109/16.906451': [1531], '30': [1536], 'Dambrine,': [1538], 'Cappy,': [1540], 'F.': [1541], 'Heliodore,': [1542], 'Playez,': [1545], 'method': [1548], 'determining': [1550], 'FET': [1552], 'small-signal': [1553], 'equivalent': [1554], 'circuit,': [1555], 'Theory': [1559], 'Tech': [1560], '36': [1561], '1151–1159.': [1563], '10.1109/22.3650': [1564], '31': [1569], 'Kumar,': [1571, 1607], 'W.': [1572, 1608], 'Lu,': [1573, 1609], 'Swindt,': [1575, 1611], 'Van': [1577], 'Hove,': [1578], 'Chow,': [1580], 'Adesida,': [1583, 1623], '0.25-μm': [1584], 'gate-length,': [1585], 'MBE-grown': [1586], 'AlGaN:GaN': [1587], 'current': [1591], 'FT,': [1594], '37': [1597], '858–859.': [1599], '10.1049/el:20010582': [1600], 'Kuliev,': [1613], 'Simin,': [1615], 'SiC': [1627], 'FT': [1629], 'over': [1631], '120': [1632], 'GHz,': [1633], '455–457.': [1640], '10.1109/LED.2002.801303': [1641], 'Citing': [1646], 'Literature': [1647], 'Volume46,': [1648], 'Issue420': [1649], 'August': [1650], '2005Pages': [1651], 'ReferencesRelatedInformation': [1653]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2003063557', 'counts_by_year': [{'year': 2023, 'cited_by_count': 1}, {'year': 2021, 'cited_by_count': 1}, {'year': 2020, 'cited_by_count': 1}, {'year': 2019, 'cited_by_count': 1}, {'year': 2018, 'cited_by_count': 3}, {'year': 2017, 'cited_by_count': 1}, {'year': 2016, 'cited_by_count': 2}, {'year': 2015, 'cited_by_count': 1}, {'year': 2014, 'cited_by_count': 1}], 'updated_date': '2024-09-24T06:39:23.915634', 'created_date': '2016-06-24'}