Title: Real-time scanning tunneling microscopy observation of the evolution of Ge quantum dots on nanopatterned Si(001) surfaces
Abstract: To investigate the effect of surface patterning on island growth, a real-time study by scanning tunneling microscopy (STM) of Ge deposition on nanostructured Si(001) surfaces is presented. The substrate is nanopatterned by the STM tip and the subsequent evolution of a Ge layer deposited at 500 \ifmmode^\circ\else\textdegree\fi{}C is recorded. The formation of the wetting layer, a transition stage and the growth of three-dimensional (3D) Ge huts are examined dynamically. The 2D-3D transition is described in terms of the nucleation and evolution of pre-pyramids consisting of (001) oriented terraces, which eventually transform into pyramids by successive introduction of {105} facets. Substrate patterning strongly affects the positioning of 3D islands, and represents a route toward ordering of Ge islands.
Publication Year: 2004
Publication Date: 2004-05-26
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 41
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