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Title: $Piezoelectric Microactuators for Use in Magnetic Disk Drives
Abstract: A head-slider drive dual-stage microactuator system for use in magnetic disk drives was developed. This microactuator system has a symmetrical structure and operation, and utilizes simple rectangular multilayered piezoelectric actuator devices. A prototype model with a pico slider and head suspension was tested and demonstrated. It exhibited a 0.8 µm displacement at a dc applied voltage of 30 V and a fundamental resonant frequency of over 20 kHz.