Title: Growth of Patterned Nanopore Arrays of Anodic Aluminum Oxide
Abstract: An inexpensive procedure to fabricate highly ordered , patterned through‐hole nanopore arrays of anodic aluminum oxide (AAO, see Figure) with intermittent aluminum supports has been developed. Silica was used as the anodization barrier. Using a two‐step anodization process, straight nanopores of AAO are formed in the unpatterned areas; no pores are found in the patterned areas.
Publication Year: 2003
Publication Date: 2003-12-03
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 35
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