Title: Ion Sampling Study in Gaseous Plasmas Using a Simple QMF
Abstract:A simply-constructed Quadrupole Mass Filter (QMF) was used to study the plasma ionic constituents in the positive column of a dc discharge. The instrumental calibration constant, the ratio of the dete...A simply-constructed Quadrupole Mass Filter (QMF) was used to study the plasma ionic constituents in the positive column of a dc discharge. The instrumental calibration constant, the ratio of the detected ion current I i to the electron density n e produced at the positive column source, was measured as a function of the discharge pressure and current. The electron density n e was measured by the floating double-probe method. Measurements in the low-pressure region of the discharge below 2 Torr showed an approximate proportionality between I i and n e , except for a slight dependence on discharge current and pressure. Some experimental data are reported on the ion current ratio measurements I (Ar 2 + )/I(Ar + ) for argon discharge at pressures varying from 0.4 to 9 Torr and for a discharge current density of 220 mA/cm 2 . The ion ratios obtained here are compared with those obtained by other authors.Read More
Publication Year: 1983
Publication Date: 1983-02-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 2
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