Publication Information

{'id': 'https://openalex.org/W1983218957', 'doi': 'https://doi.org/10.1117/12.601062', 'title': 'Detecting focus-sensitive configurations during OPC', 'display_name': 'Detecting focus-sensitive configurations during OPC', 'publication_year': 2005, 'publication_date': '2005-05-05', 'ids': {'openalex': 'https://openalex.org/W1983218957', 'doi': 'https://doi.org/10.1117/12.601062', 'mag': '1983218957'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1117/12.601062', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S183492911', 'display_name': 'Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE', 'issn_l': '0277-786X', 'issn': ['0277-786X', '1996-756X'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310315543', 'host_organization_name': 'SPIE', 'host_organization_lineage': ['https://openalex.org/P4310315543'], 'host_organization_lineage_names': ['SPIE'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'proceedings-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': False, 'oa_status': 'closed', 'oa_url': None, 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5063980925', 'display_name': 'Lawrence S. Melvin', 'orcid': 'https://orcid.org/0000-0002-6553-6688'}, 'institutions': [{'id': 'https://openalex.org/I4210088951', 'display_name': 'Synopsys (United States)', 'ror': 'https://ror.org/013by2m91', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I4210088951']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'Lawrence S. Melvin III', 'raw_affiliation_strings': ['Synopsys Inc, United States'], 'affiliations': [{'raw_affiliation_string': 'Synopsys Inc, United States', 'institution_ids': ['https://openalex.org/I4210088951']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5065626502', 'display_name': 'James P. Shiely', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I4210088951', 'display_name': 'Synopsys (United States)', 'ror': 'https://ror.org/013by2m91', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I4210088951']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'James P. Shiely', 'raw_affiliation_strings': ['Synopsys Inc, United States'], 'affiliations': [{'raw_affiliation_string': 'Synopsys Inc, United States', 'institution_ids': ['https://openalex.org/I4210088951']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5109936480', 'display_name': 'Qiliang Yan', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I4210088951', 'display_name': 'Synopsys (United States)', 'ror': 'https://ror.org/013by2m91', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I4210088951']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'Qiliang Yan', 'raw_affiliation_strings': ['Synopsys Inc, United States'], 'affiliations': [{'raw_affiliation_string': 'Synopsys Inc, United States', 'institution_ids': ['https://openalex.org/I4210088951']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 1, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': None, 'apc_paid': None, 'fwci': 0.0, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 0, 'citation_normalized_percentile': {'value': 0.0, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 0, 'max': 61}, 'biblio': {'volume': '5756', 'issue': None, 'first_page': '255', 'last_page': '255'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T11338', 'display_name': 'Advancements in Photolithography Techniques', 'score': 0.9999, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T11338', 'display_name': 'Advancements in Photolithography Techniques', 'score': 0.9999, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T13114', 'display_name': 'Image Processing Techniques and Applications', 'score': 0.9955, 'subfield': {'id': 'https://openalex.org/subfields/2214', 'display_name': 'Media Technology'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T12224', 'display_name': 'Nanofabrication and Lithography Techniques', 'score': 0.9859, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/optical-proximity-correction', 'display_name': 'Optical proximity correction', 'score': 0.8859365}, {'id': 'https://openalex.org/keywords/process-window', 'display_name': 'Process window', 'score': 0.87026036}, {'id': 'https://openalex.org/keywords/process-variation', 'display_name': 'Process Variation', 'score': 0.74221045}, {'id': 'https://openalex.org/keywords/robustness', 'display_name': 'Robustness', 'score': 0.6450372}, {'id': 'https://openalex.org/keywords/heuristics', 'display_name': 'Heuristics', 'score': 0.5851229}, {'id': 'https://openalex.org/keywords/process-corners', 'display_name': 'Process corners', 'score': 0.4291247}], 'concepts': [{'id': 'https://openalex.org/C78371743', 'wikidata': 'https://www.wikidata.org/wiki/Q1672829', 'display_name': 'Optical proximity correction', 'level': 3, 'score': 0.8859365}, {'id': 'https://openalex.org/C2777441419', 'wikidata': 'https://www.wikidata.org/wiki/Q16969460', 'display_name': 'Process window', 'level': 3, 'score': 0.87026036}, {'id': 'https://openalex.org/C93389723', 'wikidata': 'https://www.wikidata.org/wiki/Q7247313', 'display_name': 'Process variation', 'level': 3, 'score': 0.74221045}, {'id': 'https://openalex.org/C41008148', 'wikidata': 'https://www.wikidata.org/wiki/Q21198', 'display_name': 'Computer science', 'level': 0, 'score': 0.7099697}, {'id': 'https://openalex.org/C175291020', 'wikidata': 'https://www.wikidata.org/wiki/Q1156822', 'display_name': 'Offset (computer science)', 'level': 2, 'score': 0.6698351}, {'id': 'https://openalex.org/C63479239', 'wikidata': 'https://www.wikidata.org/wiki/Q7353546', 'display_name': 'Robustness (evolution)', 'level': 3, 'score': 0.6450372}, {'id': 'https://openalex.org/C127705205', 'wikidata': 'https://www.wikidata.org/wiki/Q5748245', 'display_name': 'Heuristics', 'level': 2, 'score': 0.5851229}, {'id': 'https://openalex.org/C192209626', 'wikidata': 'https://www.wikidata.org/wiki/Q190909', 'display_name': 'Focus (optics)', 'level': 2, 'score': 0.55237347}, {'id': 'https://openalex.org/C98045186', 'wikidata': 'https://www.wikidata.org/wiki/Q205663', 'display_name': 'Process (computing)', 'level': 2, 'score': 0.52405643}, {'id': 'https://openalex.org/C165005293', 'wikidata': 'https://www.wikidata.org/wiki/Q1074500', 'display_name': 'Chip', 'level': 2, 'score': 0.4375273}, {'id': 'https://openalex.org/C204223013', 'wikidata': 'https://www.wikidata.org/wiki/Q133036', 'display_name': 'Lithography', 'level': 2, 'score': 0.43350574}, {'id': 'https://openalex.org/C192615534', 'wikidata': 'https://www.wikidata.org/wiki/Q7247268', 'display_name': 'Process corners', 'level': 3, 'score': 0.4291247}, {'id': 'https://openalex.org/C105487726', 'wikidata': 'https://www.wikidata.org/wiki/Q622938', 'display_name': 'Photolithography', 'level': 2, 'score': 0.42400342}, {'id': 'https://openalex.org/C11413529', 'wikidata': 'https://www.wikidata.org/wiki/Q8366', 'display_name': 'Algorithm', 'level': 1, 'score': 0.38931865}, {'id': 'https://openalex.org/C76155785', 'wikidata': 'https://www.wikidata.org/wiki/Q418', 'display_name': 'Telecommunications', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C55493867', 'wikidata': 'https://www.wikidata.org/wiki/Q7094', 'display_name': 'Biochemistry', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C185592680', 'wikidata': 'https://www.wikidata.org/wiki/Q2329', 'display_name': 'Chemistry', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C121332964', 'wikidata': 'https://www.wikidata.org/wiki/Q413', 'display_name': 'Physics', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C120665830', 'wikidata': 'https://www.wikidata.org/wiki/Q14620', 'display_name': 'Optics', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C104317684', 'wikidata': 'https://www.wikidata.org/wiki/Q7187', 'display_name': 'Gene', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C199360897', 'wikidata': 'https://www.wikidata.org/wiki/Q9143', 'display_name': 'Programming language', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C111919701', 'wikidata': 'https://www.wikidata.org/wiki/Q9135', 'display_name': 'Operating system', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C142362112', 'wikidata': 'https://www.wikidata.org/wiki/Q735', 'display_name': 'Art', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C153349607', 'wikidata': 'https://www.wikidata.org/wiki/Q36649', 'display_name': 'Visual arts', 'level': 1, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1117/12.601062', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S183492911', 'display_name': 'Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE', 'issn_l': '0277-786X', 'issn': ['0277-786X', '1996-756X'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310315543', 'host_organization_name': 'SPIE', 'host_organization_lineage': ['https://openalex.org/P4310315543'], 'host_organization_lineage_names': ['SPIE'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': None, 'sustainable_development_goals': [], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 0, 'referenced_works': [], 'related_works': ['https://openalex.org/W2955165539', 'https://openalex.org/W2344299637', 'https://openalex.org/W2072472266', 'https://openalex.org/W2069004321', 'https://openalex.org/W2066897999', 'https://openalex.org/W2061902689', 'https://openalex.org/W2038980326', 'https://openalex.org/W1989945751', 'https://openalex.org/W1983218957', 'https://openalex.org/W1976886430'], 'abstract_inverted_index': {'Model-based': [0], 'optical': [1], 'proximity': [2], 'correction': [3, 63], '(OPC)': [4], 'calculates': [5], 'pattern': [6, 171], 'adjustments': [7], 'by': [8, 97, 214], 'simulating': [9, 110], 'the': [10, 50, 84, 124, 143, 174, 179, 199, 218], 'layout': [11, 232], 'with': [12, 129, 159, 186], 'calibrated': [13], 'lithography': [14, 23], 'and': [15, 47, 59, 92, 131], 'process': [16, 42, 88, 99, 112, 126, 137, 157, 189], 'models.': [17], 'OPC': [18, 33, 60, 116, 197], 'can': [19, 61, 152, 193, 210], 'only': [20], 'correct': [21], 'systematic': [22], 'deviations,': [24], 'those': [25], 'error': [26, 38], 'components': [27, 39], 'that': [28, 151], 'repeat': [29], 'chip': [30], 'to': [31, 65, 134, 155, 216], 'chip.': [32], 'cannot': [34], 'compensate': [35], 'random': [36, 55], 'deviation': [37], 'from': [40, 54, 178], 'unpredictable': [41], 'variations,': [43], 'such': [44], 'as': [45, 173], 'defocus': [46, 91, 206, 219], 'dose.': [48], 'However': [49], 'ranges': [51], 'of': [52, 81, 86, 145, 149, 221], 'variation': [53, 158], 'effects': [56], 'is': [57, 95, 105], 'predictable,': [58], 'optimize': [62], 'shapes': [64], 'minimize': [66], 'this': [67, 75, 141, 191], 'range': [68, 85], 'where': [69], 'possible.': [70], 'Current': [71], 'techniques': [72], 'for': [73, 201], 'supporting': [74, 229], 'optimization': [76], 'involve': [77], 'applying': [78], 'a': [79, 106, 119, 146, 160, 187], 'set': [80], 'models': [82, 203], 'covering': [83], 'expected': [87], 'variations': [89], 'in': [90, 167, 184], 'exposure.': [93], 'Variation': [94], 'assessed': [96], 'comparing': [98], 'corner-point': [100], 'model': [101, 122, 150, 165, 192, 209], 'evaluations.': [102], 'Because': [103], 'there': [104], 'significant': [107], 'runtime': [108], 'cost': [109], 'multiple': [111, 202], 'conditions,': [113], 'most': [114], 'production': [115], 'jobs': [117], 'use': [118], 'single,': [120], 'representative': [121], '(typically': [123], '"nominal"': [125], 'condition)': [127], 'aided': [128], 'rules': [130], 'other': [132], 'heuristics': [133], 'help': [135], 'handle': [136], 'window': [138], 'effects.': [139], 'In': [140], 'paper': [142], 'application': [144], 'new': [147], 'type': [148], 'be': [153, 212], 'used': [154, 213], 'predict': [156], 'single': [161], 'simulation': [162], 'call.': [163], 'The': [164], 'involved': [166], 'these': [168], 'studies': [169], 'targets': [170], 'behavior': [172], 'focus': [175, 181], 'offset': [176], 'deviates': [177], 'nominal': [180, 188], 'setting.': [182], 'Used': [183], 'conjunction': [185], 'model,': [190], 'support': [194], 'process-window': [195], 'optimized': [196], 'without': [198], 'need': [200], 'at': [204], 'various': [205], 'settings.': [207], 'This': [208], 'also': [211], 'itself': [215], 'assess': [217], 'robustness': [220], 'any': [222], 'configuration': [223], 'before': [224], 'or': [225], 'after': [226], 'OPC,': [227], 'thereby': [228], 'efficient': [230], 'model-based': [231], 'verification.': [233]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W1983218957', 'counts_by_year': [], 'updated_date': '2024-12-14T06:52:49.326993', 'created_date': '2016-06-24'}