Title: Bulk-acoustic waves radiated from low-loss surface-acoustic-wave resonators
Abstract:The bulk-acoustic conductance in low-loss surface-acoustic-wave filters utilizing leaky surface-acoustic waves is significant for the device operation. Here we directly measure the bulk acoustic wave ...The bulk-acoustic conductance in low-loss surface-acoustic-wave filters utilizing leaky surface-acoustic waves is significant for the device operation. Here we directly measure the bulk acoustic wave radiation pattern on the backside of the piezoelectric substrate with the help of a scanning laser-interferometer probe. For the case studied, a leaky surface-acoustic wave resonator on 36°YX–LiTaO3, a numerical calculation is carried out and the different bulk-wave modes arriving at the substrate bottom are identified by comparing the measured and computed energy-flow angles. The results are expected to lead to improved models for describing the operation of low-loss surface-acoustic-wave filters.Read More
Publication Year: 2004
Publication Date: 2004-02-20
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 20
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