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{'id': 'https://openalex.org/W1971870134', 'doi': 'https://doi.org/10.1088/0960-1317/17/6/r01', 'title': 'SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography', 'display_name': 'SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography', 'publication_year': 2007, 'publication_date': '2007-05-15', 'ids': {'openalex': 'https://openalex.org/W1971870134', 'doi': 'https://doi.org/10.1088/0960-1317/17/6/r01', 'mag': '1971870134'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1088/0960-1317/17/6/r01', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S170809390', 'display_name': 'Journal of Micromechanics and Microengineering', 'issn_l': '0960-1317', 'issn': ['0960-1317', '1361-6439'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320083', 'host_organization_name': 'IOP Publishing', 'host_organization_lineage': ['https://openalex.org/P4310311669', 'https://openalex.org/P4310320083'], 'host_organization_lineage_names': ['Institute of Physics', 'IOP Publishing'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': False, 'oa_status': 'closed', 'oa_url': None, 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5057209464', 'display_name': 'Aránzazu del Campo', 'orcid': 'https://orcid.org/0000-0001-5725-2135'}, 'institutions': [{'id': 'https://openalex.org/I4210135521', 'display_name': 'Max Planck Institute for Intelligent Systems', 'ror': 'https://ror.org/04fq9j139', 'country_code': 'DE', 'type': 'facility', 'lineage': ['https://openalex.org/I149899117', 'https://openalex.org/I4210135521']}, {'id': 'https://openalex.org/I149899117', 'display_name': 'Max Planck Society', 'ror': 'https://ror.org/01hhn8329', 'country_code': 'DE', 'type': 'nonprofit', 'lineage': ['https://openalex.org/I149899117']}], 'countries': ['DE'], 'is_corresponding': False, 'raw_author_name': 'A del Campo', 'raw_affiliation_strings': ['Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society'], 'affiliations': [{'raw_affiliation_string': 'Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society', 'institution_ids': ['https://openalex.org/I4210135521', 'https://openalex.org/I149899117']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5067374965', 'display_name': 'Christian Greiner', 'orcid': 'https://orcid.org/0000-0001-8079-336X'}, 'institutions': [{'id': 'https://openalex.org/I4210135521', 'display_name': 'Max Planck Institute for Intelligent Systems', 'ror': 'https://ror.org/04fq9j139', 'country_code': 'DE', 'type': 'facility', 'lineage': ['https://openalex.org/I149899117', 'https://openalex.org/I4210135521']}, {'id': 'https://openalex.org/I149899117', 'display_name': 'Max Planck Society', 'ror': 'https://ror.org/01hhn8329', 'country_code': 'DE', 'type': 'nonprofit', 'lineage': ['https://openalex.org/I149899117']}], 'countries': ['DE'], 'is_corresponding': False, 'raw_author_name': 'C Greiner', 'raw_affiliation_strings': ['Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society'], 'affiliations': [{'raw_affiliation_string': 'Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society', 'institution_ids': ['https://openalex.org/I4210135521', 'https://openalex.org/I149899117']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 2, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': None, 'apc_paid': None, 'fwci': 25.407, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 777, 'citation_normalized_percentile': {'value': 0.99998, 'is_in_top_1_percent': True, 'is_in_top_10_percent': True}, 'cited_by_percentile_year': {'min': 99, 'max': 100}, 'biblio': {'volume': '17', 'issue': '6', 'first_page': 'R81', 'last_page': 'R95'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T11338', 'display_name': 'Advancements in Photolithography Techniques', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T11338', 'display_name': 'Advancements in Photolithography Techniques', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T12224', 'display_name': 'Nanofabrication and Lithography Techniques', 'score': 0.9998, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T11301', 'display_name': 'Advanced Surface Polishing Techniques', 'score': 0.9991, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/photoresist', 'display_name': 'Photoresist', 'score': 0.96470475}, {'id': 'https://openalex.org/keywords/chemical-mechanical-planarization', 'display_name': 'Chemical Mechanical Planarization', 'score': 0.7485968}, {'id': 'https://openalex.org/keywords/aspect-ratio', 'display_name': 'Aspect ratio (aeronautics)', 'score': 0.60464674}], 'concepts': [{'id': 'https://openalex.org/C134406635', 'wikidata': 'https://www.wikidata.org/wiki/Q1439684', 'display_name': 'Photoresist', 'level': 3, 'score': 0.96470475}, {'id': 'https://openalex.org/C204223013', 'wikidata': 'https://www.wikidata.org/wiki/Q133036', 'display_name': 'Lithography', 'level': 2, 'score': 0.8169237}, {'id': 'https://openalex.org/C180088628', 'wikidata': 'https://www.wikidata.org/wiki/Q1069404', 'display_name': 'Chemical-mechanical planarization', 'level': 3, 'score': 0.7485968}, {'id': 'https://openalex.org/C82558694', 'wikidata': 'https://www.wikidata.org/wiki/Q1545619', 'display_name': 'Aspect ratio (aeronautics)', 'level': 2, 'score': 0.60464674}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.589132}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.5856791}, {'id': 'https://openalex.org/C105487726', 'wikidata': 'https://www.wikidata.org/wiki/Q622938', 'display_name': 'Photolithography', 'level': 2, 'score': 0.58509076}, {'id': 'https://openalex.org/C53524968', 'wikidata': 'https://www.wikidata.org/wiki/Q7315582', 'display_name': 'Resist', 'level': 3, 'score': 0.5494534}, {'id': 'https://openalex.org/C2781448156', 'wikidata': 'https://www.wikidata.org/wiki/Q1570182', 'display_name': 'Coating', 'level': 2, 'score': 0.5069302}, {'id': 'https://openalex.org/C49040817', 'wikidata': 'https://www.wikidata.org/wiki/Q193091', 'display_name': 'Optoelectronics', 'level': 1, 'score': 0.3664593}, {'id': 'https://openalex.org/C2779227376', 'wikidata': 'https://www.wikidata.org/wiki/Q6505497', 'display_name': 'Layer (electronics)', 'level': 2, 'score': 0.19343424}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1088/0960-1317/17/6/r01', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S170809390', 'display_name': 'Journal of Micromechanics and Microengineering', 'issn_l': '0960-1317', 'issn': ['0960-1317', '1361-6439'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320083', 'host_organization_name': 'IOP Publishing', 'host_organization_lineage': ['https://openalex.org/P4310311669', 'https://openalex.org/P4310320083'], 'host_organization_lineage_names': ['Institute of Physics', 'IOP Publishing'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': None, 'sustainable_development_goals': [], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 149, 'referenced_works': ['https://openalex.org/W1501261314', 'https://openalex.org/W1679395621', 'https://openalex.org/W1963927254', 'https://openalex.org/W1964080277', 'https://openalex.org/W1965133676', 'https://openalex.org/W1967362514', 'https://openalex.org/W1967468712', 'https://openalex.org/W1968911474', 'https://openalex.org/W1970143526', 'https://openalex.org/W1971191158', 'https://openalex.org/W1973499432', 'https://openalex.org/W1974775846', 'https://openalex.org/W1975156481', 'https://openalex.org/W1976546431', 'https://openalex.org/W1977211631', 'https://openalex.org/W1978838377', 'https://openalex.org/W1979494690', 'https://openalex.org/W1979988100', 'https://openalex.org/W1980124237', 'https://openalex.org/W1981150295', 'https://openalex.org/W1981751001', 'https://openalex.org/W1982110580', 'https://openalex.org/W1985025804', 'https://openalex.org/W1985225370', 'https://openalex.org/W1986606045', 'https://openalex.org/W1987633071', 'https://openalex.org/W1988612706', 'https://openalex.org/W1989527898', 'https://openalex.org/W1989913882', 'https://openalex.org/W1991255622', 'https://openalex.org/W1991486567', 'https://openalex.org/W1991523334', 'https://openalex.org/W1993633645', 'https://openalex.org/W1996413408', 'https://openalex.org/W1996902847', 'https://openalex.org/W1996907900', 'https://openalex.org/W1996935462', 'https://openalex.org/W1997326653', 'https://openalex.org/W1998291804', 'https://openalex.org/W2000043949', 'https://openalex.org/W2002503725', 'https://openalex.org/W2002601077', 'https://openalex.org/W2003168015', 'https://openalex.org/W2003788292', 'https://openalex.org/W2004910611', 'https://openalex.org/W2004981264', 'https://openalex.org/W2005044401', 'https://openalex.org/W2007128171', 'https://openalex.org/W2007284954', 'https://openalex.org/W2007862943', 'https://openalex.org/W2010171577', 'https://openalex.org/W2011067919', 'https://openalex.org/W2011772057', 'https://openalex.org/W2013693294', 'https://openalex.org/W2014880400', 'https://openalex.org/W2015008487', 'https://openalex.org/W2016152447', 'https://openalex.org/W2017454010', 'https://openalex.org/W2017519359', 'https://openalex.org/W2018539320', 'https://openalex.org/W2018888820', 'https://openalex.org/W2020250144', 'https://openalex.org/W2021992896', 'https://openalex.org/W2022312899', 'https://openalex.org/W2022641865', 'https://openalex.org/W2023602384', 'https://openalex.org/W2024571270', 'https://openalex.org/W2025187624', 'https://openalex.org/W2026232871', 'https://openalex.org/W2027069301', 'https://openalex.org/W2028567428', 'https://openalex.org/W2030642882', 'https://openalex.org/W2033095458', 'https://openalex.org/W2036124601', 'https://openalex.org/W2037543096', 'https://openalex.org/W2038330647', 'https://openalex.org/W2039628220', 'https://openalex.org/W2044420104', 'https://openalex.org/W2045339871', 'https://openalex.org/W2045562812', 'https://openalex.org/W2047146054', 'https://openalex.org/W2047533790', 'https://openalex.org/W2049148240', 'https://openalex.org/W2050039952', 'https://openalex.org/W2050347888', 'https://openalex.org/W2052756405', 'https://openalex.org/W2055483884', 'https://openalex.org/W2057594908', 'https://openalex.org/W2057814759', 'https://openalex.org/W2058010933', 'https://openalex.org/W2058600116', 'https://openalex.org/W2059719935', 'https://openalex.org/W2060575384', 'https://openalex.org/W2060729250', 'https://openalex.org/W2061430282', 'https://openalex.org/W2068176475', 'https://openalex.org/W2069271438', 'https://openalex.org/W2070154681', 'https://openalex.org/W2070202728', 'https://openalex.org/W2070395100', 'https://openalex.org/W2070625173', 'https://openalex.org/W2072518504', 'https://openalex.org/W2072557182', 'https://openalex.org/W2072686885', 'https://openalex.org/W2078420558', 'https://openalex.org/W2079452860', 'https://openalex.org/W2081875458', 'https://openalex.org/W2082197045', 'https://openalex.org/W2084545039', 'https://openalex.org/W2085237633', 'https://openalex.org/W2085572463', 'https://openalex.org/W2087363161', 'https://openalex.org/W2087834630', 'https://openalex.org/W2088752698', 'https://openalex.org/W2088753544', 'https://openalex.org/W2089190438', 'https://openalex.org/W2089535059', 'https://openalex.org/W2093432275', 'https://openalex.org/W2094652797', 'https://openalex.org/W2101987950', 'https://openalex.org/W2103745164', 'https://openalex.org/W2109485720', 'https://openalex.org/W2113440380', 'https://openalex.org/W2117663380', 'https://openalex.org/W2123573427', 'https://openalex.org/W2123627138', 'https://openalex.org/W2124391417', 'https://openalex.org/W2128427912', 'https://openalex.org/W2129678820', 'https://openalex.org/W2130512172', 'https://openalex.org/W2133466271', 'https://openalex.org/W2135372088', 'https://openalex.org/W2138421757', 'https://openalex.org/W2140829145', 'https://openalex.org/W2142303686', 'https://openalex.org/W2146487873', 'https://openalex.org/W2146954781', 'https://openalex.org/W2148927531', 'https://openalex.org/W2152432112', 'https://openalex.org/W2159072100', 'https://openalex.org/W2163781698', 'https://openalex.org/W2164341086', 'https://openalex.org/W2167102601', 'https://openalex.org/W2341010021', 'https://openalex.org/W2486119844', 'https://openalex.org/W3011891279', 'https://openalex.org/W4231275965', 'https://openalex.org/W4248033625', 'https://openalex.org/W4285719527'], 'related_works': ['https://openalex.org/W4226294346', 'https://openalex.org/W2920584510', 'https://openalex.org/W2379376890', 'https://openalex.org/W2376266960', 'https://openalex.org/W2321285900', 'https://openalex.org/W2178933900', 'https://openalex.org/W2045098484', 'https://openalex.org/W2004754773', 'https://openalex.org/W1999595755', 'https://openalex.org/W1990950348'], 'abstract_inverted_index': {'SU-8': [0, 71], 'has': [1], 'become': [2], 'the': [3], 'favourite': [4], 'photoresist': [5], 'for': [6], 'high-aspect-ratio': [7], '(HAR)': [8], 'and': [9, 20, 28, 37, 43, 50, 65, 69, 73], 'three-dimensional': [10], '(3D)': [11], 'lithographic': [12], 'patterning': [13], 'due': [14], 'to': [15, 52, 77], 'its': [16, 26], 'excellent': [17], 'coating,': [18], 'planarization': [19], 'processing': [21], 'properties': [22], 'as': [23, 25, 32], 'well': [24], 'mechanical': [27], 'chemical': [29], 'stability.': [30], 'However,': [31], 'feature': [33], 'sizes': [34], 'get': [35], 'smaller': [36], 'pattern': [38], 'complexity': [39], 'increases,': [40], 'particular': [41], 'difficulties': [42], 'a': [44, 59], 'number': [45], 'of': [46, 62], 'material-related': [47], 'issues': [48], 'arise': [49], 'need': [51], 'be': [53], 'carefully': [54], 'considered.': [55], 'This': [56], 'review': [57], 'presents': [58], 'detailed': [60], 'description': [61], 'these': [63], 'effects': [64], 'describes': [66], 'reported': [67], 'strategies': [68], 'achieved': [70], 'HAR': [72], '3D': [74], 'structures': [75], 'up': [76], 'August': [78], '2006.': [79]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W1971870134', 'counts_by_year': [{'year': 2024, 'cited_by_count': 31}, {'year': 2023, 'cited_by_count': 19}, {'year': 2022, 'cited_by_count': 27}, {'year': 2021, 'cited_by_count': 36}, {'year': 2020, 'cited_by_count': 49}, {'year': 2019, 'cited_by_count': 46}, {'year': 2018, 'cited_by_count': 63}, {'year': 2017, 'cited_by_count': 56}, {'year': 2016, 'cited_by_count': 59}, {'year': 2015, 'cited_by_count': 65}, {'year': 2014, 'cited_by_count': 66}, {'year': 2013, 'cited_by_count': 54}, {'year': 2012, 'cited_by_count': 64}], 'updated_date': '2025-01-11T17:54:13.483774', 'created_date': '2016-06-24'}