Title: ALD: Emerging Materials, Processes, and Nanoscale Technology Applications
Abstract:Nanoscale (zero-thickness) thin film growth processes such as atomic layer deposition are under extensive development for potential use in key nanoelectronics applications. The unique characteristics ...Nanoscale (zero-thickness) thin film growth processes such as atomic layer deposition are under extensive development for potential use in key nanoelectronics applications. The unique characteristics of these processes make them potentially enabling for a number of emerging nanotechnology-driven technologies. This paper discusses several of these potential applications and highlights specific fields where ALD is being researched.Read More
Publication Year: 2006
Publication Date: 2006-07-07
Language: en
Type: article
Indexed In: ['crossref']
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