Get quick answers to your questions about the article from our AI researcher chatbot
{'id': 'https://openalex.org/W1967765983', 'doi': 'https://doi.org/10.1116/1.3527011', 'title': 'Dual-sputtered process sensitivity of HfGdO charge-trapping layer in SONOS-type nonvolatile memory', 'display_name': 'Dual-sputtered process sensitivity of HfGdO charge-trapping layer in SONOS-type nonvolatile memory', 'publication_year': 2011, 'publication_date': '2011-01-01', 'ids': {'openalex': 'https://openalex.org/W1967765983', 'doi': 'https://doi.org/10.1116/1.3527011', 'mag': '1967765983'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1116/1.3527011', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S4210235835', 'display_name': 'Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena', 'issn_l': '2166-2746', 'issn': ['2166-2746', '2166-2754'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': False, 'oa_status': 'closed', 'oa_url': None, 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5039659628', 'display_name': 'Jer‐Chyi Wang', 'orcid': 'https://orcid.org/0000-0002-1308-3197'}, 'institutions': [{'id': 'https://openalex.org/I173093425', 'display_name': 'Chang Gung University', 'ror': 'https://ror.org/00d80zx46', 'country_code': 'TW', 'type': 'education', 'lineage': ['https://openalex.org/I173093425']}], 'countries': ['TW'], 'is_corresponding': False, 'raw_author_name': 'Jer-Chyi Wang', 'raw_affiliation_strings': ['Department of Electronic Engineering, Chang Gung University, Kweishan, Taoyuan 333, Taiwan'], 'affiliations': [{'raw_affiliation_string': 'Department of Electronic Engineering, Chang Gung University, Kweishan, Taoyuan 333, Taiwan', 'institution_ids': ['https://openalex.org/I173093425']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5028141021', 'display_name': 'Pai-Chi Chou', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I173093425', 'display_name': 'Chang Gung University', 'ror': 'https://ror.org/00d80zx46', 'country_code': 'TW', 'type': 'education', 'lineage': ['https://openalex.org/I173093425']}], 'countries': ['TW'], 'is_corresponding': False, 'raw_author_name': 'Pai-Chi Chou', 'raw_affiliation_strings': ['Department of Electronic Engineering, Chang Gung University, Kweishan, Taoyuan 333, Taiwan'], 'affiliations': [{'raw_affiliation_string': 'Department of Electronic Engineering, Chang Gung University, Kweishan, Taoyuan 333, Taiwan', 'institution_ids': ['https://openalex.org/I173093425']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5088759255', 'display_name': 'Chao‐Sung Lai', 'orcid': 'https://orcid.org/0000-0002-2069-7533'}, 'institutions': [{'id': 'https://openalex.org/I173093425', 'display_name': 'Chang Gung University', 'ror': 'https://ror.org/00d80zx46', 'country_code': 'TW', 'type': 'education', 'lineage': ['https://openalex.org/I173093425']}], 'countries': ['TW'], 'is_corresponding': False, 'raw_author_name': 'Chao-Sung Lai', 'raw_affiliation_strings': ['Department of Electronic Engineering, Chang Gung University, Kweishan, Taoyuan 333, Taiwan'], 'affiliations': [{'raw_affiliation_string': 'Department of Electronic Engineering, Chang Gung University, Kweishan, Taoyuan 333, Taiwan', 'institution_ids': ['https://openalex.org/I173093425']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5039909807', 'display_name': 'Li-Chi Liu', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I173093425', 'display_name': 'Chang Gung University', 'ror': 'https://ror.org/00d80zx46', 'country_code': 'TW', 'type': 'education', 'lineage': ['https://openalex.org/I173093425']}], 'countries': ['TW'], 'is_corresponding': False, 'raw_author_name': 'Li-Chi Liu', 'raw_affiliation_strings': ['Department of Electronic Engineering, Chang Gung University, Kweishan, Taoyuan 333, Taiwan'], 'affiliations': [{'raw_affiliation_string': 'Department of Electronic Engineering, Chang Gung University, Kweishan, Taoyuan 333, Taiwan', 'institution_ids': ['https://openalex.org/I173093425']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 1, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': None, 'apc_paid': None, 'fwci': 0.677, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 4, 'citation_normalized_percentile': {'value': 0.59005, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 79, 'max': 80}, 'biblio': {'volume': '29', 'issue': '1', 'first_page': '011009', 'last_page': '011009'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T10472', 'display_name': 'Atomic Layer Deposition Technology', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T10472', 'display_name': 'Atomic Layer Deposition Technology', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10502', 'display_name': 'Memristive Devices for Neuromorphic Computing', 'score': 0.9997, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T12808', 'display_name': 'Ferroelectric Devices for Low-Power Nanoscale Applications', 'score': 0.9996, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/icon', 'display_name': 'Icon', 'score': 0.86729395}, {'id': 'https://openalex.org/keywords/non-volatile-memory', 'display_name': 'Non-Volatile Memory', 'score': 0.568616}, {'id': 'https://openalex.org/keywords/memory-applications', 'display_name': 'Memory Applications', 'score': 0.545218}, {'id': 'https://openalex.org/keywords/download', 'display_name': 'Download', 'score': 0.5136265}], 'concepts': [{'id': 'https://openalex.org/C2778447006', 'wikidata': 'https://www.wikidata.org/wiki/Q1156474', 'display_name': 'Icon', 'level': 2, 'score': 0.86729395}, {'id': 'https://openalex.org/C41008148', 'wikidata': 'https://www.wikidata.org/wiki/Q21198', 'display_name': 'Computer science', 'level': 0, 'score': 0.58699316}, {'id': 'https://openalex.org/C2778805511', 'wikidata': 'https://www.wikidata.org/wiki/Q1713', 'display_name': 'Citation', 'level': 2, 'score': 0.5599801}, {'id': 'https://openalex.org/C2780154274', 'wikidata': 'https://www.wikidata.org/wiki/Q7126717', 'display_name': 'Download', 'level': 2, 'score': 0.5136265}, {'id': 'https://openalex.org/C21200559', 'wikidata': 'https://www.wikidata.org/wiki/Q7451068', 'display_name': 'Sensitivity (control systems)', 'level': 2, 'score': 0.4327038}, {'id': 'https://openalex.org/C98045186', 'wikidata': 'https://www.wikidata.org/wiki/Q205663', 'display_name': 'Process (computing)', 'level': 2, 'score': 0.41933444}, {'id': 'https://openalex.org/C23123220', 'wikidata': 'https://www.wikidata.org/wiki/Q816826', 'display_name': 'Information retrieval', 'level': 1, 'score': 0.36708504}, {'id': 'https://openalex.org/C136764020', 'wikidata': 'https://www.wikidata.org/wiki/Q466', 'display_name': 'World Wide Web', 'level': 1, 'score': 0.3089435}, {'id': 'https://openalex.org/C127413603', 'wikidata': 'https://www.wikidata.org/wiki/Q11023', 'display_name': 'Engineering', 'level': 0, 'score': 0.16402236}, {'id': 'https://openalex.org/C111919701', 'wikidata': 'https://www.wikidata.org/wiki/Q9135', 'display_name': 'Operating system', 'level': 1, 'score': 0.12730417}, {'id': 'https://openalex.org/C24326235', 'wikidata': 'https://www.wikidata.org/wiki/Q126095', 'display_name': 'Electronic engineering', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C199360897', 'wikidata': 'https://www.wikidata.org/wiki/Q9143', 'display_name': 'Programming language', 'level': 1, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1116/1.3527011', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S4210235835', 'display_name': 'Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena', 'issn_l': '2166-2746', 'issn': ['2166-2746', '2166-2754'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': None, 'sustainable_development_goals': [{'display_name': 'Affordable and clean energy', 'score': 0.82, 'id': 'https://metadata.un.org/sdg/7'}], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 32, 'referenced_works': ['https://openalex.org/W1485283179', 'https://openalex.org/W1575325779', 'https://openalex.org/W1634198957', 'https://openalex.org/W1978668762', 'https://openalex.org/W1983009794', 'https://openalex.org/W1984473494', 'https://openalex.org/W1998320671', 'https://openalex.org/W2003124709', 'https://openalex.org/W2003182420', 'https://openalex.org/W2014182282', 'https://openalex.org/W2037534199', 'https://openalex.org/W2039996672', 'https://openalex.org/W2043658072', 'https://openalex.org/W2047942200', 'https://openalex.org/W2049274304', 'https://openalex.org/W2052989978', 'https://openalex.org/W2058571189', 'https://openalex.org/W2062788479', 'https://openalex.org/W2069134906', 'https://openalex.org/W2085195941', 'https://openalex.org/W2099162130', 'https://openalex.org/W2110690375', 'https://openalex.org/W2120095424', 'https://openalex.org/W2124065310', 'https://openalex.org/W2124696172', 'https://openalex.org/W2131096404', 'https://openalex.org/W2132555393', 'https://openalex.org/W2133980904', 'https://openalex.org/W2134171705', 'https://openalex.org/W2134330702', 'https://openalex.org/W2136377570', 'https://openalex.org/W2137105664'], 'related_works': ['https://openalex.org/W4360922125', 'https://openalex.org/W4283720006', 'https://openalex.org/W4207071872', 'https://openalex.org/W3175319091', 'https://openalex.org/W2981902742', 'https://openalex.org/W220677501', 'https://openalex.org/W2175435306', 'https://openalex.org/W2076882245', 'https://openalex.org/W2056060060', 'https://openalex.org/W1504514227'], 'abstract_inverted_index': {'Views': [0, 2], 'Icon': [1, 15, 22, 28], 'Article': [3], 'contents': [4], 'Figures': [5], '&': [6, 97, 107], 'tables': [7], 'Video': [8], 'Audio': [9], 'Supplementary': [10], 'Data': [11], 'Peer': [12], 'Review': [13], 'Share': [14, 16], 'Twitter': [17], 'Facebook': [18], 'Reddit': [19], 'LinkedIn': [20], 'Tools': [21, 23], 'Reprints': [24], 'and': [25, 102], 'Permissions': [26], 'Cite': [27, 29], 'Search': [30, 80, 87, 110, 112, 114], 'Site': [31], 'Citation': [32], 'Jer-Chyi': [33], 'Wang,': [34], 'Pai-Chi': [35], 'Chou,': [36], 'Chao-Sung': [37], 'Lai,': [38], 'Li-Chi': [39], 'Liu;': [40], 'Dual-sputtered': [41], 'process': [42], 'sensitivity': [43], 'of': [44, 99, 104], 'HfGdO': [45], 'charge-trapping': [46], 'layer': [47], 'in': [48], 'SONOS-type': [49], 'nonvolatile': [50], 'memory.': [51], 'J.': [52], 'Vac.': [53], 'Sci.': [54], 'Technol.': [55], 'B': [56, 109], '1': [57], 'January': [58], '2011;': [59], '29': [60], '(1):': [61], '011009.': [62], 'https://doi.org/10.1116/1.3527011': [63], 'Download': [64], 'citation': [65], 'file:': [66], 'Ris': [67], '(Zotero)': [68], 'Reference': [69], 'Manager': [70], 'EasyBib': [71], 'Bookends': [72], 'Mendeley': [73], 'Papers': [74], 'EndNote': [75], 'RefWorks': [76], 'BibTex': [77], 'toolbar': [78, 83], 'search': [79, 84, 85, 93], 'Dropdown': [81], 'Menu': [82], 'input': [86, 88], 'auto': [89], 'suggest': [90], 'filter': [91], 'your': [92], 'All': [94], 'ContentAVS:': [95], 'Science': [96, 106], 'Technology': [98, 108], 'Materials': [100], 'Interfaces': [101], 'ProcessingJournal': [103], 'Vacuum': [105], 'Advanced': [111], '|Citation': [113]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W1967765983', 'counts_by_year': [{'year': 2014, 'cited_by_count': 1}, {'year': 2013, 'cited_by_count': 1}, {'year': 2012, 'cited_by_count': 2}], 'updated_date': '2024-09-14T17:29:27.049616', 'created_date': '2016-06-24'}