Formation of TiO<sub>2</sub> and ZrO<sub>2</sub> Nanotubes Using Atomic Layer Deposition with Ultraprecise Control of the Wall Thickness

Name: Work Video:
Duration: 3 min 30 s
Description: Nanotubes of TiO2 and ZrO2 (see Figure) with diameters of ca. 30–200 nm have been successfully fabricated by atomic layer deposition in a one-step process utilizing nanoporous membranes (commercial polycarbonate filters) as templates. Sub-angstrom wall thickness control and high aspect ratios can be achieved by this method.
Hyunsu Shin; Daekyun Jeong; Jaegab Lee; Myung M. Sung; Jaeyun Kim
{'id': 'https://openalex.org/W1965841757', 'doi': 'https://doi.org/10.1002/adma.200306296', 'title': 'Formation of TiO<sub>2</sub> and ZrO<sub>2</sub> Nanotubes Using Atomic Layer Deposition with Ultraprecise Control of the Wall Thickness', 'display_name': 'Formation of TiO<sub>2</sub> and ZrO<sub>2</sub> Nanotubes Using Atomic Layer Deposition with Ultraprecise Control of the Wall Thickness', 'publication_year': 2004, 'publication_date': '2004-07-05', 'ids': {'openalex': 'https://openalex.org/W1965841757', 'doi': 'https://doi.org/10.1002/adma.200306296', 'mag': '1965841757'}, 'language': 'en', 'primary_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.1002/adma.200306296', 'pdf_url': 'https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/adma.200306296', 'source': {'id': 'https://openalex.org/S99352657', 'display_name': 'Advanced Materials', 'issn_l': '0935-9648', 'issn': ['0935-9648', '1521-4095'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': True, 'oa_status': 'bronze', 'oa_url': 'https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/adma.200306296', 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5109178944', 'display_name': 'Hyunsu Shin', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I110273157', 'display_name': 'Kookmin University', 'ror': 'https://ror.org/0049erg63', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I110273157']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'H. Shin', 'raw_affiliation_strings': [' Kookmin University'], 'affiliations': [{'raw_affiliation_string': ' Kookmin University', 'institution_ids': ['https://openalex.org/I110273157']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5010986765', 'display_name': 'Daekyun Jeong', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I110273157', 'display_name': 'Kookmin University', 'ror': 'https://ror.org/0049erg63', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I110273157']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'D.‐K. Jeong', 'raw_affiliation_strings': [' Kookmin University'], 'affiliations': [{'raw_affiliation_string': ' Kookmin University', 'institution_ids': ['https://openalex.org/I110273157']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5015796687', 'display_name': 'Jaegab Lee', 'orcid': 'https://orcid.org/0000-0002-2188-8710'}, 'institutions': [{'id': 'https://openalex.org/I110273157', 'display_name': 'Kookmin University', 'ror': 'https://ror.org/0049erg63', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I110273157']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'J. Lee', 'raw_affiliation_strings': [' Kookmin University'], 'affiliations': [{'raw_affiliation_string': ' Kookmin University', 'institution_ids': ['https://openalex.org/I110273157']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5089218042', 'display_name': 'Myung M. Sung', 'orcid': 'https://orcid.org/0000-0002-2291-5274'}, 'institutions': [{'id': 'https://openalex.org/I110273157', 'display_name': 'Kookmin University', 'ror': 'https://ror.org/0049erg63', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I110273157']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'M.\u2009M. Sung', 'raw_affiliation_strings': ['Department of Chemistry, Kookmin University, 861-1, Chongnung-dong, Songbuk-ku, Seoul, 136-702, Korea'], 'affiliations': [{'raw_affiliation_string': 'Department of Chemistry, Kookmin University, 861-1, Chongnung-dong, Songbuk-ku, Seoul, 136-702, Korea', 'institution_ids': ['https://openalex.org/I110273157']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5088837397', 'display_name': 'Jaeyun Kim', 'orcid': 'https://orcid.org/0000-0002-4687-6732'}, 'institutions': [{'id': 'https://openalex.org/I110273157', 'display_name': 'Kookmin University', 'ror': 'https://ror.org/0049erg63', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I110273157']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'J. Kim', 'raw_affiliation_strings': [' Kookmin University'], 'affiliations': [{'raw_affiliation_string': ' Kookmin University', 'institution_ids': ['https://openalex.org/I110273157']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 1, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': {'value': 5250, 'currency': 'USD', 'value_usd': 5250, 'provenance': 'doaj'}, 'apc_paid': None, 'fwci': 10.372, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 256, 'citation_normalized_percentile': {'value': 0.999974, 'is_in_top_1_percent': True, 'is_in_top_10_percent': True}, 'cited_by_percentile_year': {'min': 98, 'max': 99}, 'biblio': {'volume': '16', 'issue': '14', 'first_page': '1197', 'last_page': '1200'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T10472', 'display_name': 'Semiconductor materials and devices', 'score': 0.9999, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T10472', 'display_name': 'Semiconductor materials and devices', 'score': 0.9999, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10192', 'display_name': 'Catalytic Processes in Materials Science', 'score': 0.9978, 'subfield': {'id': 'https://openalex.org/subfields/2505', 'display_name': 'Materials Chemistry'}, 'field': {'id': 'https://openalex.org/fields/25', 'display_name': 'Materials Science'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T12340', 'display_name': 'Anodic Oxide Films and Nanostructures', 'score': 0.9976, 'subfield': {'id': 'https://openalex.org/subfields/2505', 'display_name': 'Materials Chemistry'}, 'field': {'id': 'https://openalex.org/fields/25', 'display_name': 'Materials Science'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/nanoporous', 'display_name': 'Nanoporous', 'score': 0.79192793}, {'id': 'https://openalex.org/keywords/polycarbonate', 'display_name': 'Polycarbonate', 'score': 0.73477626}, {'id': 'https://openalex.org/keywords/angstrom', 'display_name': 'Angstrom', 'score': 0.6848501}, {'id': 'https://openalex.org/keywords/deposition', 'display_name': 'Deposition', 'score': 0.59116393}, {'id': 'https://openalex.org/keywords/template', 'display_name': 'Template', 'score': 0.49514118}], 'concepts': [{'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.9073442}, {'id': 'https://openalex.org/C69544855', 'wikidata': 'https://www.wikidata.org/wiki/Q757625', 'display_name': 'Atomic layer deposition', 'level': 3, 'score': 0.886926}, {'id': 'https://openalex.org/C48940184', 'wikidata': 'https://www.wikidata.org/wiki/Q17623309', 'display_name': 'Nanoporous', 'level': 2, 'score': 0.79192793}, {'id': 'https://openalex.org/C2779227376', 'wikidata': 'https://www.wikidata.org/wiki/Q6505497', 'display_name': 'Layer (electronics)', 'level': 2, 'score': 0.7389847}, {'id': 'https://openalex.org/C2776540798', 'wikidata': 'https://www.wikidata.org/wiki/Q62246', 'display_name': 'Polycarbonate', 'level': 2, 'score': 0.73477626}, {'id': 'https://openalex.org/C37407028', 'wikidata': 'https://www.wikidata.org/wiki/Q81454', 'display_name': 'Angstrom', 'level': 2, 'score': 0.6848501}, {'id': 'https://openalex.org/C64297162', 'wikidata': 'https://www.wikidata.org/wiki/Q1987070', 'display_name': 'Deposition (geology)', 'level': 3, 'score': 0.59116393}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.5313647}, {'id': 'https://openalex.org/C82714645', 'wikidata': 'https://www.wikidata.org/wiki/Q438331', 'display_name': 'Template', 'level': 2, 'score': 0.49514118}, {'id': 'https://openalex.org/C42360764', 'wikidata': 'https://www.wikidata.org/wiki/Q83588', 'display_name': 'Chemical engineering', 'level': 1, 'score': 0.45983097}, {'id': 'https://openalex.org/C41625074', 'wikidata': 'https://www.wikidata.org/wiki/Q176088', 'display_name': 'Membrane', 'level': 2, 'score': 0.4360964}, {'id': 'https://openalex.org/C159985019', 'wikidata': 'https://www.wikidata.org/wiki/Q181790', 'display_name': 'Composite material', 'level': 1, 'score': 0.36052948}, {'id': 'https://openalex.org/C8010536', 'wikidata': 'https://www.wikidata.org/wiki/Q160398', 'display_name': 'Crystallography', 'level': 1, 'score': 0.1411492}, {'id': 'https://openalex.org/C151730666', 'wikidata': 'https://www.wikidata.org/wiki/Q7205', 'display_name': 'Paleontology', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C185592680', 'wikidata': 'https://www.wikidata.org/wiki/Q2329', 'display_name': 'Chemistry', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C54355233', 'wikidata': 'https://www.wikidata.org/wiki/Q7162', 'display_name': 'Genetics', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C2816523', 'wikidata': 'https://www.wikidata.org/wiki/Q180184', 'display_name': 'Sediment', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C127413603', 'wikidata': 'https://www.wikidata.org/wiki/Q11023', 'display_name': 'Engineering', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C86803240', 'wikidata': 'https://www.wikidata.org/wiki/Q420', 'display_name': 'Biology', 'level': 0, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': True, 'landing_page_url': 'https://doi.org/10.1002/adma.200306296', 'pdf_url': 'https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/adma.200306296', 'source': {'id': 'https://openalex.org/S99352657', 'display_name': 'Advanced Materials', 'issn_l': '0935-9648', 'issn': ['0935-9648', '1521-4095'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}], 'best_oa_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.1002/adma.200306296', 'pdf_url': 'https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/adma.200306296', 'source': {'id': 'https://openalex.org/S99352657', 'display_name': 'Advanced Materials', 'issn_l': '0935-9648', 'issn': ['0935-9648', '1521-4095'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'sustainable_development_goals': [], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 26, 'referenced_works': ['https://openalex.org/W186228304', 'https://openalex.org/W1963522997', 'https://openalex.org/W1964627878', 'https://openalex.org/W1967370119', 'https://openalex.org/W1976627842', 'https://openalex.org/W1981237622', 'https://openalex.org/W1988702125', 'https://openalex.org/W1991661990', 'https://openalex.org/W1992864043', 'https://openalex.org/W1994070458', 'https://openalex.org/W1995491878', 'https://openalex.org/W2001673909', 'https://openalex.org/W2006899770', 'https://openalex.org/W2018858346', 'https://openalex.org/W2029323313', 'https://openalex.org/W2052100693', 'https://openalex.org/W2056435370', 'https://openalex.org/W2102831456', 'https://openalex.org/W2117264318', 'https://openalex.org/W2123025816', 'https://openalex.org/W2142547791', 'https://openalex.org/W2151332348', 'https://openalex.org/W2165489416', 'https://openalex.org/W2318832576', 'https://openalex.org/W4206818003', 'https://openalex.org/W4233576730'], 'related_works': ['https://openalex.org/W4283775057', 'https://openalex.org/W2580934393', 'https://openalex.org/W2392706677', 'https://openalex.org/W2350165959', 'https://openalex.org/W2348627187', 'https://openalex.org/W2323406752', 'https://openalex.org/W2012802373', 'https://openalex.org/W2010633083', 'https://openalex.org/W1982332521', 'https://openalex.org/W1858505807'], 'abstract_inverted_index': {'Nanotubes': [0], 'of': [1, 9], 'TiO2': [2], 'and': [3, 37], 'ZrO2': [4], '(see': [5], 'Figure)': [6], 'with': [7], 'diameters': [8], 'ca.': [10], '30–200': [11], 'nm': [12], 'have': [13], 'been': [14], 'successfully': [15], 'fabricated': [16], 'by': [17, 44], 'atomic': [18], 'layer': [19], 'deposition': [20], 'in': [21], 'a': [22], 'one-step': [23], 'process': [24], 'utilizing': [25], 'nanoporous': [26], 'membranes': [27], '(commercial': [28], 'polycarbonate': [29], 'filters)': [30], 'as': [31], 'templates.': [32], 'Sub-angstrom': [33], 'wall': [34], 'thickness': [35], 'control': [36], 'high': [38], 'aspect': [39], 'ratios': [40], 'can': [41], 'be': [42], 'achieved': [43], 'this': [45], 'method.': [46]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W1965841757', 'counts_by_year': [{'year': 2024, 'cited_by_count': 3}, {'year': 2023, 'cited_by_count': 3}, {'year': 2022, 'cited_by_count': 3}, {'year': 2021, 'cited_by_count': 10}, {'year': 2020, 'cited_by_count': 7}, {'year': 2019, 'cited_by_count': 13}, {'year': 2018, 'cited_by_count': 14}, {'year': 2017, 'cited_by_count': 14}, {'year': 2016, 'cited_by_count': 6}, {'year': 2015, 'cited_by_count': 17}, {'year': 2014, 'cited_by_count': 16}, {'year': 2013, 'cited_by_count': 24}, {'year': 2012, 'cited_by_count': 23}], 'updated_date': '2025-01-03T00:41:01.145713', 'created_date': '2016-06-24'}
Publication Information

Basic Information

Access and Citation

AI Researcher Chatbot

Primary Location

Authors

Topics

Keywords

Related Works
