Publication Information

{'id': 'https://openalex.org/W1964107152', 'doi': 'https://doi.org/10.1016/j.mee.2006.08.003', 'title': 'Predicting mask distortion, clogging and pattern transfer for stencil lithography', 'display_name': 'Predicting mask distortion, clogging and pattern transfer for stencil lithography', 'publication_year': 2006, 'publication_date': '2006-09-06', 'ids': {'openalex': 'https://openalex.org/W1964107152', 'doi': 'https://doi.org/10.1016/j.mee.2006.08.003', 'mag': '1964107152'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1016/j.mee.2006.08.003', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S158028765', 'display_name': 'Microelectronic Engineering', 'issn_l': '0167-9317', 'issn': ['0167-9317', '1873-5568'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320990', 'host_organization_name': 'Elsevier BV', 'host_organization_lineage': ['https://openalex.org/P4310320990'], 'host_organization_lineage_names': ['Elsevier BV'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': True, 'oa_status': 'green', 'oa_url': 'https://infoscience.epfl.ch/bitstreams/c775cbad-4fbe-45ba-9255-8cc5cf8b63b6/download', 'any_repository_has_fulltext': True}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5043364755', 'display_name': 'Maryna Lishchynska', 'orcid': 'https://orcid.org/0000-0002-5396-5848'}, 'institutions': [], 'countries': ['IE'], 'is_corresponding': False, 'raw_author_name': 'Maryna Lishchynska', 'raw_affiliation_strings': ['Tyndall National institute, Lee Maltings, Prospect Row, Cork, Ireland'], 'affiliations': [{'raw_affiliation_string': 'Tyndall National institute, Lee Maltings, Prospect Row, Cork, Ireland', 'institution_ids': []}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5084013218', 'display_name': 'Victor Bourenkov', 'orcid': None}, 'institutions': [], 'countries': ['IE'], 'is_corresponding': False, 'raw_author_name': 'Victor Bourenkov', 'raw_affiliation_strings': ['Tyndall National institute, Lee Maltings, Prospect Row, Cork, Ireland'], 'affiliations': [{'raw_affiliation_string': 'Tyndall National institute, Lee Maltings, Prospect Row, Cork, Ireland', 'institution_ids': []}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5041735185', 'display_name': 'M A F van den Boogaart', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I5124864', 'display_name': 'École Polytechnique Fédérale de Lausanne', 'ror': 'https://ror.org/02s376052', 'country_code': 'CH', 'type': 'education', 'lineage': ['https://openalex.org/I2799323385', 'https://openalex.org/I5124864']}], 'countries': ['CH'], 'is_corresponding': False, 'raw_author_name': 'Marc A.F. van den Boogaart', 'raw_affiliation_strings': ['EPFL, Laboratoire des Microsystèmes, CH-1015 Lausanne, Switzerland'], 'affiliations': [{'raw_affiliation_string': 'EPFL, Laboratoire des Microsystèmes, CH-1015 Lausanne, Switzerland', 'institution_ids': ['https://openalex.org/I5124864']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5070425748', 'display_name': 'L M Doeswijk', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I5124864', 'display_name': 'École Polytechnique Fédérale de Lausanne', 'ror': 'https://ror.org/02s376052', 'country_code': 'CH', 'type': 'education', 'lineage': ['https://openalex.org/I2799323385', 'https://openalex.org/I5124864']}], 'countries': ['CH'], 'is_corresponding': False, 'raw_author_name': 'Lianne Doeswijk', 'raw_affiliation_strings': ['EPFL, Laboratoire des Microsystèmes, CH-1015 Lausanne, Switzerland'], 'affiliations': [{'raw_affiliation_string': 'EPFL, Laboratoire des Microsystèmes, CH-1015 Lausanne, Switzerland', 'institution_ids': ['https://openalex.org/I5124864']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5107195137', 'display_name': 'Juergen Brügger', 'orcid': 'https://orcid.org/0000-0002-7710-5930'}, 'institutions': [{'id': 'https://openalex.org/I5124864', 'display_name': 'École Polytechnique Fédérale de Lausanne', 'ror': 'https://ror.org/02s376052', 'country_code': 'CH', 'type': 'education', 'lineage': ['https://openalex.org/I2799323385', 'https://openalex.org/I5124864']}], 'countries': ['CH'], 'is_corresponding': False, 'raw_author_name': 'Juergen Brugger', 'raw_affiliation_strings': ['EPFL, Laboratoire des Microsystèmes, CH-1015 Lausanne, Switzerland'], 'affiliations': [{'raw_affiliation_string': 'EPFL, Laboratoire des Microsystèmes, CH-1015 Lausanne, Switzerland', 'institution_ids': ['https://openalex.org/I5124864']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5045558475', 'display_name': 'James C. Greer', 'orcid': 'https://orcid.org/0000-0002-9236-6565'}, 'institutions': [], 'countries': ['IE'], 'is_corresponding': False, 'raw_author_name': 'James C. Greer', 'raw_affiliation_strings': ['Tyndall National institute, Lee Maltings, Prospect Row, Cork, Ireland'], 'affiliations': [{'raw_affiliation_string': 'Tyndall National institute, Lee Maltings, Prospect Row, Cork, Ireland', 'institution_ids': []}]}], 'institution_assertions': [], 'countries_distinct_count': 2, 'institutions_distinct_count': 1, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': {'value': 2750, 'currency': 'USD', 'value_usd': 2750, 'provenance': 'doaj'}, 'apc_paid': None, 'fwci': 3.679, 'has_fulltext': True, 'fulltext_origin': 'pdf', 'cited_by_count': 45, 'citation_normalized_percentile': {'value': 0.895954, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 92, 'max': 93}, 'biblio': {'volume': '84', 'issue': '1', 'first_page': '42', 'last_page': '53'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T12224', 'display_name': 'Nanofabrication and Lithography Techniques', 'score': 0.9999, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T12224', 'display_name': 'Nanofabrication and Lithography Techniques', 'score': 0.9999, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T11338', 'display_name': 'Advancements in Photolithography Techniques', 'score': 0.9998, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T11301', 'display_name': 'Advanced Surface Polishing Techniques', 'score': 0.9988, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/stencil', 'display_name': 'Stencil', 'score': 0.9803127}, {'id': 'https://openalex.org/keywords/distortion', 'display_name': 'Distortion (music)', 'score': 0.7725121}, {'id': 'https://openalex.org/keywords/clogging', 'display_name': 'Clogging', 'score': 0.4329009}], 'concepts': [{'id': 'https://openalex.org/C76752949', 'wikidata': 'https://www.wikidata.org/wiki/Q7607499', 'display_name': 'Stencil', 'level': 2, 'score': 0.9803127}, {'id': 'https://openalex.org/C126780896', 'wikidata': 'https://www.wikidata.org/wiki/Q899871', 'display_name': 'Distortion (music)', 'level': 4, 'score': 0.7725121}, {'id': 'https://openalex.org/C204223013', 'wikidata': 'https://www.wikidata.org/wiki/Q133036', 'display_name': 'Lithography', 'level': 2, 'score': 0.743316}, {'id': 'https://openalex.org/C136525101', 'wikidata': 'https://www.wikidata.org/wiki/Q5428139', 'display_name': 'Fabrication', 'level': 3, 'score': 0.5693977}, {'id': 'https://openalex.org/C41008148', 'wikidata': 'https://www.wikidata.org/wiki/Q21198', 'display_name': 'Computer science', 'level': 0, 'score': 0.5271993}, {'id': 'https://openalex.org/C204366326', 'wikidata': 'https://www.wikidata.org/wiki/Q3027650', 'display_name': 'Deformation (meteorology)', 'level': 2, 'score': 0.4880861}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.47819424}, {'id': 'https://openalex.org/C2778152828', 'wikidata': 'https://www.wikidata.org/wiki/Q488656', 'display_name': 'Clogging', 'level': 2, 'score': 0.4329009}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.35697934}, {'id': 'https://openalex.org/C459310', 'wikidata': 'https://www.wikidata.org/wiki/Q117801', 'display_name': 'Computational science', 'level': 1, 'score': 0.23446843}, {'id': 'https://openalex.org/C49040817', 'wikidata': 'https://www.wikidata.org/wiki/Q193091', 'display_name': 'Optoelectronics', 'level': 1, 'score': 0.13501143}, {'id': 'https://openalex.org/C159985019', 'wikidata': 'https://www.wikidata.org/wiki/Q181790', 'display_name': 'Composite material', 'level': 1, 'score': 0.105342925}, {'id': 'https://openalex.org/C71924100', 'wikidata': 'https://www.wikidata.org/wiki/Q11190', 'display_name': 'Medicine', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C194257627', 'wikidata': 'https://www.wikidata.org/wiki/Q211554', 'display_name': 'Amplifier', 'level': 3, 'score': 0.0}, {'id': 'https://openalex.org/C204787440', 'wikidata': 'https://www.wikidata.org/wiki/Q188504', 'display_name': 'Alternative medicine', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C142724271', 'wikidata': 'https://www.wikidata.org/wiki/Q7208', 'display_name': 'Pathology', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C166957645', 'wikidata': 'https://www.wikidata.org/wiki/Q23498', 'display_name': 'Archaeology', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C95457728', 'wikidata': 'https://www.wikidata.org/wiki/Q309', 'display_name': 'History', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C46362747', 'wikidata': 'https://www.wikidata.org/wiki/Q173431', 'display_name': 'CMOS', 'level': 2, 'score': 0.0}], 'mesh': [], 'locations_count': 3, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1016/j.mee.2006.08.003', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S158028765', 'display_name': 'Microelectronic Engineering', 'issn_l': '0167-9317', 'issn': ['0167-9317', '1873-5568'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320990', 'host_organization_name': 'Elsevier BV', 'host_organization_lineage': ['https://openalex.org/P4310320990'], 'host_organization_lineage_names': ['Elsevier BV'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, {'is_oa': True, 'landing_page_url': 'https://infoscience.epfl.ch/handle/20.500.14299/2221', 'pdf_url': 'https://infoscience.epfl.ch/bitstreams/c775cbad-4fbe-45ba-9255-8cc5cf8b63b6/download', 'source': {'id': 'https://openalex.org/S4306400487', 'display_name': 'Infoscience (Ecole Polytechnique Fédérale de Lausanne)', 'issn_l': None, 'issn': None, 'is_oa': True, 'is_in_doaj': False, 'is_core': False, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'repository'}, 'license': 'other-oa', 'license_id': 'https://openalex.org/licenses/other-oa', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, {'is_oa': True, 'landing_page_url': 'http://infoscience.epfl.ch/record/100059', 'pdf_url': 'https://infoscience.epfl.ch/record/100059/files/Lishchynska_2007_MicroEng.pdf', 'source': {'id': 'https://openalex.org/S4306400488', 'display_name': 'Infoscience (Ecole Polytechnique Fédérale de Lausanne)', 'issn_l': None, 'issn': None, 'is_oa': True, 'is_in_doaj': False, 'is_core': False, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'repository'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}], 'best_oa_location': {'is_oa': True, 'landing_page_url': 'https://infoscience.epfl.ch/handle/20.500.14299/2221', 'pdf_url': 'https://infoscience.epfl.ch/bitstreams/c775cbad-4fbe-45ba-9255-8cc5cf8b63b6/download', 'source': {'id': 'https://openalex.org/S4306400487', 'display_name': 'Infoscience (Ecole Polytechnique Fédérale de Lausanne)', 'issn_l': None, 'issn': None, 'is_oa': True, 'is_in_doaj': False, 'is_core': False, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'repository'}, 'license': 'other-oa', 'license_id': 'https://openalex.org/licenses/other-oa', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'sustainable_development_goals': [], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 30, 'referenced_works': ['https://openalex.org/W1582502033', 'https://openalex.org/W1626099979', 'https://openalex.org/W1966417765', 'https://openalex.org/W1987040379', 'https://openalex.org/W1993004731', 'https://openalex.org/W1998717539', 'https://openalex.org/W2001948828', 'https://openalex.org/W2003205461', 'https://openalex.org/W2007245618', 'https://openalex.org/W2023022883', 'https://openalex.org/W2025866481', 'https://openalex.org/W2029238389', 'https://openalex.org/W2036149825', 'https://openalex.org/W2044696410', 'https://openalex.org/W2050132318', 'https://openalex.org/W2054111428', 'https://openalex.org/W2056436577', 'https://openalex.org/W2071672976', 'https://openalex.org/W2093738546', 'https://openalex.org/W2127200470', 'https://openalex.org/W2139972815', 'https://openalex.org/W2143735096', 'https://openalex.org/W2147754009', 'https://openalex.org/W2149201567', 'https://openalex.org/W2152207164', 'https://openalex.org/W2155045812', 'https://openalex.org/W2158954545', 'https://openalex.org/W2159545680', 'https://openalex.org/W2991476337', 'https://openalex.org/W4298019739'], 'related_works': ['https://openalex.org/W4390373003', 'https://openalex.org/W4386383777', 'https://openalex.org/W4382281921', 'https://openalex.org/W4288032844', 'https://openalex.org/W2800363021', 'https://openalex.org/W2341984281', 'https://openalex.org/W2123358595', 'https://openalex.org/W1997355222', 'https://openalex.org/W1909614652', 'https://openalex.org/W1492209788'], 'abstract_inverted_index': None, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W1964107152', 'counts_by_year': [{'year': 2024, 'cited_by_count': 3}, {'year': 2023, 'cited_by_count': 1}, {'year': 2022, 'cited_by_count': 1}, {'year': 2021, 'cited_by_count': 2}, {'year': 2019, 'cited_by_count': 2}, {'year': 2018, 'cited_by_count': 2}, {'year': 2017, 'cited_by_count': 2}, {'year': 2016, 'cited_by_count': 1}, {'year': 2015, 'cited_by_count': 2}, {'year': 2014, 'cited_by_count': 3}, {'year': 2013, 'cited_by_count': 4}], 'updated_date': '2025-01-08T17:21:37.006826', 'created_date': '2016-06-24'}