Fabrication of gated polycrystalline silicon field emitters

Name: Work Video:
Duration: 3 min 30 s
Description: Polycrystalline silicon is currently being investigated as the cathode material for flat panel displays using field emission. Conventional silicon microfabrication techniques have been adapted to produce highly uniform arrays of gridded polysilicon field emitters.
S.E. Huq; Min Huang; Peter R. Wilshaw; Philip D. Prewett
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