Title: Shallow Trench Isolation Chemical Mechanical Planarization
Abstract: This chapter contains sections titled: Introduction LOCOS to STI Shallow Trench Isolation The Planarization Step in Detail Optimization Techniques Outlook Acknowledgments Questions References
Publication Year: 2007
Publication Date: 2007-03-23
Language: en
Type: other
Indexed In: ['crossref']
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Cited By Count: 5
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