Title: GaAs micromachining for millimeter wave applications
Abstract: This paper presents the fabrication processes for micromachined millimeter wave devices on micromachined GaAs substrates. The 2.2 /spl mu/m thin GaAs/AlGaAs membrane, obtained by MBE growth and micromachining of semi-insulating <100> GaAs, is used as support for millimeter wave filter structures. Cascaded coplanar waveguide open-end series stubs filter type structures, with central frequencies of 38 and 77 GHz, as well as monolithic integrated millimeter wave receivers were designed and manufactured on GaAs micromachined substrates.
Publication Year: 2003
Publication Date: 2003-06-26
Language: en
Type: article
Indexed In: ['crossref']
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