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{'id': 'https://openalex.org/W1621083431', 'doi': 'https://doi.org/10.1109/vlsit.1998.689186', 'title': 'A Cu/low-κ dual damascene interconnect for high performance and low cost integrated circuits', 'display_name': 'A Cu/low-κ dual damascene interconnect for high performance and low cost integrated circuits', 'publication_year': 2002, 'publication_date': '2002-11-27', 'ids': {'openalex': 'https://openalex.org/W1621083431', 'doi': 'https://doi.org/10.1109/vlsit.1998.689186', 'mag': '1621083431'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1109/vlsit.1998.689186', 'pdf_url': None, 'source': None, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'proceedings-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': False, 'oa_status': 'closed', 'oa_url': None, 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5100729857', 'display_name': 'Bin Zhao', 'orcid': 'https://orcid.org/0000-0002-2966-0876'}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'B. Zhao', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5054482356', 'display_name': 'D. Feiler', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'D. Feiler', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5016315234', 'display_name': 'V. Ramanathan', 'orcid': 'https://orcid.org/0000-0001-6943-4630'}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'V. Ramanathan', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5022528299', 'display_name': 'Q.Z. Liu', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'Q.Z. Liu', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5000675086', 'display_name': 'M. Brongo', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'M. Brongo', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5014361266', 'display_name': 'J. Y. Wu', 'orcid': 'https://orcid.org/0000-0002-5080-9778'}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'J. Wu', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5008598085', 'display_name': 'H. Zhang', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'H. Zhang', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5032079701', 'display_name': 'Johnny Kuei', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'J.C. Kuei', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5045799598', 'display_name': 'David Young', 'orcid': 'https://orcid.org/0000-0002-8290-5561'}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'D. Young', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5046742689', 'display_name': 'James W.H. Brown', 'orcid': 'https://orcid.org/0009-0005-2746-6892'}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'J. Brown', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5054553172', 'display_name': 'Cong Phat Vo', 'orcid': 'https://orcid.org/0000-0001-6703-5759'}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'C. Vo', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5087637934', 'display_name': 'Weimin Xia', 'orcid': 'https://orcid.org/0000-0002-8151-9618'}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'W. Xia', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5034516120', 'display_name': 'Cao Chu', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'C. Chu', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5102922523', 'display_name': 'Jianchuan Zhou', 'orcid': 'https://orcid.org/0000-0002-3896-1224'}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'J. Zhou', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5100772699', 'display_name': 'Cuong H. Nguyen', 'orcid': 'https://orcid.org/0000-0001-5162-249X'}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'C. Nguyen', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5036126214', 'display_name': 'L. Tsau', 'orcid': None}, 'institutions': [], 'countries': [], 'is_corresponding': False, 'raw_author_name': 'L. Tsau', 'raw_affiliation_strings': [], 'affiliations': []}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5039375455', 'display_name': 'D. Dornish', 'orcid': None}, 'institutions': [], 'countries': [], 'is_corresponding': False, 'raw_author_name': 'D. Dornish', 'raw_affiliation_strings': [], 'affiliations': []}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5081115347', 'display_name': 'L.E. Camilletti', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I193427800', 'display_name': 'Applied Materials (United States)', 'ror': 'https://ror.org/04h1q4c89', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I193427800']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'L. Camilletti', 'raw_affiliation_strings': ['Applied Materials, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Applied Materials, CA, USA', 'institution_ids': ['https://openalex.org/I193427800']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5102985595', 'display_name': 'Peng Ding', 'orcid': 'https://orcid.org/0000-0001-8123-4738'}, 'institutions': [{'id': 'https://openalex.org/I193427800', 'display_name': 'Applied Materials (United States)', 'ror': 'https://ror.org/04h1q4c89', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I193427800']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'P. Ding', 'raw_affiliation_strings': ['Applied Materials, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Applied Materials, CA, USA', 'institution_ids': ['https://openalex.org/I193427800']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5073401752', 'display_name': 'Guobin Lai', 'orcid': 'https://orcid.org/0000-0003-0624-4455'}, 'institutions': [{'id': 'https://openalex.org/I193427800', 'display_name': 'Applied Materials (United States)', 'ror': 'https://ror.org/04h1q4c89', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I193427800']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'G. Lai', 'raw_affiliation_strings': ['Applied Materials, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Applied Materials, CA, USA', 'institution_ids': ['https://openalex.org/I193427800']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5017236574', 'display_name': 'Barry L. Chin', 'orcid': None}, 'institutions': [], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'B. Chin', 'raw_affiliation_strings': ['Semitool, MT, USA'], 'affiliations': [{'raw_affiliation_string': 'Semitool, MT, USA', 'institution_ids': []}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5050817994', 'display_name': 'Manoj Johnson', 'orcid': 'https://orcid.org/0000-0001-7689-0220'}, 'institutions': [], 'countries': [], 'is_corresponding': False, 'raw_author_name': 'M. Johnson', 'raw_affiliation_strings': [], 'affiliations': []}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5046986870', 'display_name': 'James Turner', 'orcid': 'https://orcid.org/0000-0003-4396-3280'}, 'institutions': [], 'countries': [], 'is_corresponding': False, 'raw_author_name': 'J. Turner', 'raw_affiliation_strings': [], 'affiliations': []}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5083721197', 'display_name': 'Tom Ritzdorf', 'orcid': None}, 'institutions': [], 'countries': [], 'is_corresponding': False, 'raw_author_name': 'T. Ritzdorf', 'raw_affiliation_strings': [], 'affiliations': []}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5002863378', 'display_name': 'Grant Wu', 'orcid': None}, 'institutions': [], 'countries': [], 'is_corresponding': False, 'raw_author_name': 'G. Wu', 'raw_affiliation_strings': [], 'affiliations': []}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5064523111', 'display_name': 'L. Cook', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I57053284', 'display_name': 'Rockwell Automation (United States)', 'ror': 'https://ror.org/01sx1pm50', 'country_code': 'US', 'type': 'company', 'lineage': ['https://openalex.org/I57053284']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'L. Cook', 'raw_affiliation_strings': ['Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA'], 'affiliations': [{'raw_affiliation_string': 'Rockwell Semiconductor Systems, Inc., Newport Beach, CA, USA', 'institution_ids': ['https://openalex.org/I57053284']}]}], 'countries_distinct_count': 1, 'institutions_distinct_count': 2, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': None, 'apc_paid': None, 'fwci': 3.804, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 13, 'citation_normalized_percentile': {'value': 0.761948, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 82, 'max': 83}, 'biblio': {'volume': None, 'issue': None, 'first_page': None, 'last_page': None}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T11661', 'display_name': 'Low Dielectric Constant Materials for Microelectronics', 'score': 0.9997, 'subfield': {'id': 'https://openalex.org/subfields/2504', 'display_name': 'Electronic, Optical and Magnetic Materials'}, 'field': {'id': 'https://openalex.org/fields/25', 'display_name': 'Materials Science'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T11661', 'display_name': 'Low Dielectric Constant Materials for Microelectronics', 'score': 0.9997, 'subfield': {'id': 'https://openalex.org/subfields/2504', 'display_name': 'Electronic, Optical and Magnetic Materials'}, 'field': {'id': 'https://openalex.org/fields/25', 'display_name': 'Materials Science'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T12084', 'display_name': 'Polyimide Materials Research', 'score': 0.9928, 'subfield': {'id': 'https://openalex.org/subfields/2507', 'display_name': 'Polymers and Plastics'}, 'field': {'id': 'https://openalex.org/fields/25', 'display_name': 'Materials Science'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10472', 'display_name': 'Atomic Layer Deposition Technology', 'score': 0.9918, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/copper-interconnect', 'display_name': 'Copper interconnect', 'score': 0.97632223}, {'id': 'https://openalex.org/keywords/low-k-dielectric', 'display_name': 'Low-k dielectric', 'score': 0.7188288}, {'id': 'https://openalex.org/keywords/interconnect-scaling', 'display_name': 'Interconnect Scaling', 'score': 0.537001}, {'id': 'https://openalex.org/keywords/low-k-dielectrics', 'display_name': 'Low-k Dielectrics', 'score': 0.531944}, {'id': 'https://openalex.org/keywords/low-dielectric-constant', 'display_name': 'Low Dielectric Constant', 'score': 0.522317}, {'id': 'https://openalex.org/keywords/dielectric-breakdown', 'display_name': 'Dielectric Breakdown', 'score': 0.51143}], 'concepts': [{'id': 'https://openalex.org/C116372231', 'wikidata': 'https://www.wikidata.org/wiki/Q605757', 'display_name': 'Copper interconnect', 'level': 3, 'score': 0.97632223}, {'id': 'https://openalex.org/C123745756', 'wikidata': 'https://www.wikidata.org/wiki/Q1665949', 'display_name': 'Interconnection', 'level': 2, 'score': 0.78231895}, {'id': 'https://openalex.org/C133386390', 'wikidata': 'https://www.wikidata.org/wiki/Q184996', 'display_name': 'Dielectric', 'level': 2, 'score': 0.7210526}, {'id': 'https://openalex.org/C2779866884', 'wikidata': 'https://www.wikidata.org/wiki/Q1872538', 'display_name': 'Low-k dielectric', 'level': 3, 'score': 0.7188288}, {'id': 'https://openalex.org/C30066665', 'wikidata': 'https://www.wikidata.org/wiki/Q164399', 'display_name': 'Capacitance', 'level': 3, 'score': 0.68779993}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.6584737}, {'id': 'https://openalex.org/C530198007', 'wikidata': 'https://www.wikidata.org/wiki/Q80831', 'display_name': 'Integrated circuit', 'level': 2, 'score': 0.59049237}, {'id': 'https://openalex.org/C2780980858', 'wikidata': 'https://www.wikidata.org/wiki/Q110022', 'display_name': 'Dual (grammatical number)', 'level': 2, 'score': 0.47379655}, {'id': 'https://openalex.org/C49040817', 'wikidata': 'https://www.wikidata.org/wiki/Q193091', 'display_name': 'Optoelectronics', 'level': 1, 'score': 0.43407845}, {'id': 'https://openalex.org/C24326235', 'wikidata': 'https://www.wikidata.org/wiki/Q126095', 'display_name': 'Electronic engineering', 'level': 1, 'score': 0.41123694}, {'id': 'https://openalex.org/C119599485', 'wikidata': 'https://www.wikidata.org/wiki/Q43035', 'display_name': 'Electrical engineering', 'level': 1, 'score': 0.3355577}, {'id': 'https://openalex.org/C41008148', 'wikidata': 'https://www.wikidata.org/wiki/Q21198', 'display_name': 'Computer science', 'level': 0, 'score': 0.18740451}, {'id': 'https://openalex.org/C127413603', 'wikidata': 'https://www.wikidata.org/wiki/Q11023', 'display_name': 'Engineering', 'level': 0, 'score': 0.14206916}, {'id': 'https://openalex.org/C76155785', 'wikidata': 'https://www.wikidata.org/wiki/Q418', 'display_name': 'Telecommunications', 'level': 1, 'score': 0.112048775}, {'id': 'https://openalex.org/C17525397', 'wikidata': 'https://www.wikidata.org/wiki/Q176140', 'display_name': 'Electrode', 'level': 2, 'score': 0.08146122}, {'id': 'https://openalex.org/C121332964', 'wikidata': 'https://www.wikidata.org/wiki/Q413', 'display_name': 'Physics', 'level': 0, 'score': 0.060587198}, {'id': 'https://openalex.org/C142362112', 'wikidata': 'https://www.wikidata.org/wiki/Q735', 'display_name': 'Art', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C124952713', 'wikidata': 'https://www.wikidata.org/wiki/Q8242', 'display_name': 'Literature', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C62520636', 'wikidata': 'https://www.wikidata.org/wiki/Q944', 'display_name': 'Quantum mechanics', 'level': 1, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1109/vlsit.1998.689186', 'pdf_url': None, 'source': None, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': None, 'sustainable_development_goals': [{'id': 'https://metadata.un.org/sdg/7', 'display_name': 'Affordable and clean energy', 'score': 0.74}], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 4, 'referenced_works': ['https://openalex.org/W2533938810', 'https://openalex.org/W2537778776', 'https://openalex.org/W2540410941', 'https://openalex.org/W2542720371'], 'related_works': ['https://openalex.org/W4242813950', 'https://openalex.org/W2543676755', 'https://openalex.org/W2157788653', 'https://openalex.org/W2125463055', 'https://openalex.org/W2084737927', 'https://openalex.org/W2066080476', 'https://openalex.org/W1998121247', 'https://openalex.org/W1991973217', 'https://openalex.org/W1914726055', 'https://openalex.org/W1621083431'], 'abstract_inverted_index': {'Copper': [0], 'and': [1, 30, 42, 51, 68], 'a': [2, 14], 'low': [3, 47, 52, 69], 'dielectric': [4, 29], 'constant': [5], '(low-/spl': [6], 'kappa/)': [7], 'material': [8, 22], 'have': [9, 56], 'been': [10, 57], 'successfully': [11], 'integrated': [12], 'in': [13, 39, 59], 'dual': [15, 61], 'damascene': [16, 62], 'interconnect': [17, 63], 'architecture.': [18], 'The': [19], 'low-/spl': [20], 'kappa/': [21], '(/spl': [23], 'kappa/=2.2)': [24], 'was': [25], 'used': [26], 'as': [27], 'intra-level': [28, 41], 'inter-level': [31, 43], 'dielectric,': [32], 'which': [33, 64], 'has': [34], 'led': [35], 'to': [36], 'significant': [37], 'reduction': [38], 'both': [40], 'capacitance.': [44], 'In': [45], 'addition,': [46], 'Cu': [48, 53], 'wiring': [49], 'resistance': [50, 55], 'via': [54], 'achieved': [58], 'the': [60], 'offers': [65], 'process': [66], 'simplification': [67], 'cost.': [70]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W1621083431', 'counts_by_year': [], 'updated_date': '2024-09-01T10:32:13.152723', 'created_date': '2016-06-24'}