Title: Design and fabrication of diffractive optical elements
Abstract: In this paper is presented the design, fabrication and characterization of a binary phase-contrast transmission diffractive optical element made by wet etching of the glass substrate. The etch depth was controlled by profilometry measurement. The experimental result is close to the result obtained by simulations.
Publication Year: 2004
Publication Date: 2004-05-06
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 5
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