Title: Performance of the trial scanning atom-probe-new approach to evaluate micro-tip array
Abstract:The scanning atom probe (SAP) was proposed to realize atom-by-atom mass analysis of a flat specimen surface with micro-tip arrays or many microcusps. The unique feature of the SAP is in the introducti...The scanning atom probe (SAP) was proposed to realize atom-by-atom mass analysis of a flat specimen surface with micro-tip arrays or many microcusps. The unique feature of the SAP is in the introduction of a microextraction electrode to the conventional atom-probe which scans over the specimen surface. In this paper a trial SAP was constructed by modifying a low temperature UHV scanning tunneling microscope (STM) with a scanning electron microscope (SEM) in order to inspect the relative position of the tip and the electrode.Read More
Publication Year: 2002
Publication Date: 2002-11-19
Language: en
Type: article
Indexed In: ['crossref']
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