Abstract: Large-Scale Fabrication of Functional Thin Films with Nanoarchitecture via Chemical Routes, F. Liu, J. Wu, J. Liu, and D. Xue Fabrication and Characterization of SiC Nanostructured/Nanocomposite Films, C.-K. Chung and B.-H. Wu Low-Dimensional Nanocomposite Fabrication and its Applications, D. Kee Yi and G.C. Papaefthymiou Optical and Optoelectronic Properties of Silicon Nanocrystals Embedded in SiO2 Matrix, T.P. Chen and L. Ding Electrical Properties of Silicon Nanocrystals Embedded in Amorphous SiO2 Films, W. Zhang, S. Zhang, Z. Liu, and T.P. Chen Properties and Applications of Sol-Gel-Derived Nanostructured Thin Films: Optical Aspects, A.C. Marques and P. Chevalier Controllably Micro/Nanostructured Films and Devices, G. Duan, W. Cai, Y. Li, and L. Jia Thin Film Shape Memory Alloy for Microsystem Applications, K.P. Mohanchandra and G.P. Carman