Title: Hydrogenation Reactions and Their Kinetics for SiCl<SUB>4</SUB>(g)&ndash;H<SUB>2</SUB>(g) and SiCl<SUB>4</SUB>(g)&ndash;Si(s)&ndash;H<SUB>2</SUB>(g) Systems Using a Fixed Bed Type Reactor
Abstract: Two kinds of hydrogenation reaction of SiCl4(g), i.e.:SiCl4(g)+H2(g)=SiHCl3(g)+HCl(g),andSi(s)+3SiCl4(g)+H2(g)=4SiHCl3(g)have been studied under various inlet gas compositions and temperatures in a fixed bed reactor at an atmospheric pressure and without any catalyst addition in order to elucidate their intrinsic reaction kinetics in this investigation. A higher conversion rate has been obtained in the latter gas-solid reaction scheme. A segment compartment model has been used to analyse the reactor performance of a plug flow type for these conversion reactions. A second order, reversible rate equation for the former gas-gas reaction has been assumed and adapted in the rate expression, which has been then used in the reactor performance model calculation. For the latter gas-solid reaction, the two step-wise reaction mechanism; i.e. the first gas-gas reaction step to produce HCl(g) and the second gas-solid reaction step of this HCl(g) with Si(s) with a topo-chemical rate model, has been adapted in the rate expression, which was then used in the reactor performance calculation. There have been shown good correspondence between the experimental results and the reactor performance calculation using these postulated reaction rate equations.