Title: Extraction of Parasitics in Inhomogeneous Substrates With a New Green Function-Based Method
Abstract: A new green function-based method for extracting parasitics in inhomogeneous substrates is presented. This approach overcomes the limitation of prior green function-based methods and allows extraction of substrate parasitics in the presence of sinkers, trenches, and wells. A careful use of volume and boundary-element meshing, as well as discrete transforms, yields a technique that is computationally efficient. The accuracy of the method is comparable to that of 3-D semiconductor device simulators with significantly smaller computational costs.
Publication Year: 2008
Publication Date: 2008-08-20
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 3
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