Title: Thermodynamics and growth kinetical consideration of metal-nitride formation by nitrogen implantation
Abstract: physica status solidi (a)Volume 113, Issue 1 p. 11-22 Review Article Thermodynamics and growth kinetical consideration of metal-nitride formation by nitrogen implantation B. X. Liu, B. X. Liu Center of Condensed Matter and Radiation Physics, CCAST, (World Laboratory), Beijing Department of Materials Science and Engineering, Tsinghua University, Beijing Search for more papers by this authorX. Zhou, X. Zhou Department of Materials Science and Engineering, Tsinghua University, Beijing Search for more papers by this authorH.-D. Li, H.-D. Li Department of Materials Science and Engineering, Tsinghua University, Beijing Search for more papers by this author B. X. Liu, B. X. Liu Center of Condensed Matter and Radiation Physics, CCAST, (World Laboratory), Beijing Department of Materials Science and Engineering, Tsinghua University, Beijing Search for more papers by this authorX. Zhou, X. Zhou Department of Materials Science and Engineering, Tsinghua University, Beijing Search for more papers by this authorH.-D. Li, H.-D. Li Department of Materials Science and Engineering, Tsinghua University, Beijing Search for more papers by this author First published: 16 May 1989 https://doi.org/10.1002/pssa.2211130102Citations: 29 Beijing 100084, People's Republic of China. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat References 1 S. T. Picraux, Annu. Rev. Mater. Sci. 14, 335 (1984). 2 C. M. Preece and J. K. 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Publication Year: 1989
Publication Date: 1989-05-16
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 29
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