Title: Optical and structural features of silicon-rich a-SiN<inf>x</inf>:H thin films
Abstract: In this work we report a systematic study of fabrication parameters and post-heat treatment on the optical features has been done. Enhancement in optical constant on annealing is attributed phase separation into crystalline silicon (c-Si) and other phases due to out- diffusion of hydrogen. We further report the room-temperature photoluminescence from as-deposited hydrogenated amorphous silicon nitride (a-SiN <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> :H) films which could be due to formation of silicon nanocrystals and/or structural disorder.
Publication Year: 2010
Publication Date: 2010-01-01
Language: en
Type: article
Indexed In: ['crossref']
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